中国光学（中英文）2025，Vol.18Issue(2)：224-236,13.DOI:10.37188/CO.2024-0149
扫描干涉曝光系统中双频激光干涉测量误差建模与分析
Error modeling and analysis of dual-frequency laser interferometry in scanning beam interference lithography system
摘要
Abstract
Scanning Beam Interference Lithography(SBIL)is an effective way to fabricate monomeric large-area high-precision gratings.Using dual-frequency laser interferometer feedback table position to splice inter-ference fringes accurately,the measurement error will inevitably introduce grating engraving error and re-duce the diffraction wavefront quality of grating.The intrinsic error caused by the laser interferometer's structure was analyzed,and the evaluation method of the intrinsic error index of the laser interferometer in complex environments was proposed.The theoretical models of dead path error and measuring optical path variation error combined with actual working conditions and empirical formulas were established.The coup-ling relationship between rotation and displacement of any table point was deduced by constructing transla-tion and rotation operators,and the measurement errors under different table attitude roll angles were simu-lated.The displacement error experiment and grating scanning exposure experiment were carried out.The ex-perimental results show that the displacement error is consistent with the theoretical calculation results.The diffraction wavefront of the 200 mm×200 mm grating is 0.278λ@632.8 nm.The analytical method in this pa-per connects the transmission link between the grating diffraction wavefront and the measurement error,lay-ing a theoretical and experimental foundation for the fabrication of meter-size nano-precision holographic gratings.关键词
扫描干涉场曝光系统/衍射波前/工作台位移测量/双频激光干涉仪/误差分析Key words
scanning beam interference lithography system/diffraction wave front/table displacement meas-urement/dual-frequency laser interferometer/error analysis分类
计算机与自动化引用本文复制引用
王新宇,李文昊,王玮,刘兆武,姜珊,周文渊,巴音贺希格..扫描干涉曝光系统中双频激光干涉测量误差建模与分析[J].中国光学（中英文）,2025,18(2):224-236,13.基金项目
国家重点研发计划资助项目(No.2022YFB3606100) （No.2022YFB3606100）
国家自然科学基金资助项目(No.U21A20509,52275554) Supported by National Key R&D Program of China(No.2022YFB3606100) （No.U21A20509,52275554）
National Natural Science Foundation of China(NSFC)(No.U21A20509,52275554) （NSFC）
