中国光学（中英文）2025，Vol.18Issue(2)：237-244,8.DOI:10.37188/CO.2024-0152
基于计算全息图零位补偿的同轴高次非球面干涉检测技术研究
CGH null compensation testing of high-order coaxial aspherical surfaces
摘要
Abstract
In order to solve problems involved in high-precision surface map testing of coaxial high-order aspherical surfaces,this paper proposes a null compensation testing method based on CGH.Based on this method,the separation of the diffraction order in the coaxial aspherical compensation design can be effectively realized,and the null compensation design of the mirror to be measured can also be realized.Combined with engineering examples,this paper realizes a null compensation testing design for a coaxial high-order aspherical mirror with a 260 mm aperture.The CGH design results show that the theoretical design testing residual(RMS value)can reach 0 nm based on the designed method.The practical testing of the coaxial high-order aspherical mirror is also completed.To further analyze the testing results,error ana-lysis is carried out on the error source in the testing process,to verify the reliability and accuracy of the method.关键词
光学检测/补偿/计算全息/同轴高次非球面Key words
optical testing/compensation/computer generated hologram/high-order coaxial aspherical sur-face分类
物理学引用本文复制引用
王慎,刘泉,国成立,闫力松..基于计算全息图零位补偿的同轴高次非球面干涉检测技术研究[J].中国光学（中英文）,2025,18(2):237-244,8.基金项目
国家重点研发计划(No.2022YFC2203904) （No.2022YFC2203904）
武汉市知识创新专项项目(基于时频空编码自由曲面高精度面形检测技术研究) （基于时频空编码自由曲面高精度面形检测技术研究）
宁波市重点研发计划(No.2024T007) Supported by the National Key Research and Development Program of China(No.2022YFC2203904) （No.2024T007）
Wuhan Knowledge Innovation Special Project(Research on high-precision surface shape detection technology based on time-frequency and space-bound freeform surfaces) （Research on high-precision surface shape detection technology based on time-frequency and space-bound freeform surfaces）
Key Research and Development Program of Ningbo(No.2024T007) （No.2024T007）
