传感技术学报2025，Vol.38Issue(3)：487-495,9.DOI:10.3969/j.issn.1004-1699.2025.03.015
基于多频磁场的平面二维时栅传感器信号解耦研究
Research on Signal Decoupling of Planar Two-Dimensional Time Grating Sensor Based on Multi-Frequency Magnetic Field
摘要
Abstract
Electromagnetic two-dimensional time grating displacement sensors are widely used in high-precision displacement measure-ment fields such as CNC machine tools and artificial intelligence.For two-dimensional time grating displacement measurement,it is nec-essary to consider the coupling problem of induction signals in the X direction and Y direction.The displacement decoupling method is developed.Firstly,the switch mixing technology is used to split the coupling signal into DC flow with displacement information and mul-tiple high-frequency additional quantities,then the filter is used to extract the key displacement information,and finally solve the dis-placement information through ADC sampling.For the electrical error introduced by two induction signals not passing through the same processing circuit,a time-division multiplexing method is proposed to control the time-sharing sequence and interleave the two induction signals.The experimental results show that under the excitation of 10 kHz and 200 kHz in the X and Y directions,the two-dimensional measurement system effectively improves the measurement accuracy and ensures the dynamic performance of the sensor.The original alignment error in the X direction is±32 μm,the original alignment error in the Y direction is±27.5 μm.关键词
二维时栅位移传感器/多频磁场/解耦方法/开关混频Key words
two-dimensional time grating displacement sensor/multi-frequency magnetic field/decoupling method/switching frequency mixing分类
计算机与自动化引用本文复制引用
杨继森,文杰,雷旭,吴灼..基于多频磁场的平面二维时栅传感器信号解耦研究[J].传感技术学报,2025,38(3):487-495,9.基金项目
国家自然科学基金(51205434,52175454) （51205434,52175454）
重庆理工大学研究生教育高质量发展行动计划资助成果(gzlcx20233417) （gzlcx20233417）
