光学精密工程2025，Vol.33Issue(4)：532-541,10.DOI:10.37188/OPE.20253304.0532
基于球面光投影成像的直线位移测量系统
Absolute linear displacement measurement system based on spherical light projection imaging
摘要
Abstract
Image-based displacement measurement using image recognition algorithms is a novel digital displacement measurement technology that offers high robustness and fault tolerance.To reduce the vol-ume of the measurement system while achieving high-resolution linear displacement measurement,a linear displacement measurement system based on spherical light projection imaging was designed.Firstly,the magnification effect of spherical light projection was utilized to design the spherical light projection imaging magnification optical path,and the pixel grayscale values captured by the image sensor were compensated based on the optical wave plane model.Subsequently,to achieve absolute position measurement and en-coding element discrimination on a single code track,a pseudo-random sequence encoding method and a decoding method based on width threshold were designed.Then,to achieve sub-pixel linear displacement measurement and enhance system accuracy,a linear displacement subdivision algorithm and a multi-cen-troid fusion algorithm were designed.Finally,an experimental setup was designed to experimentally vali-date the proposed method.The measurement optical path height of the designed experimental setup is only 5 mm.The experimental results indicate that the proposed method can achieve a theoretical resolution of 5 nm within a 250 mm range,with an error range of-3.3 μm to 3.6 μm,and after compensation,the error range is reduced to-0.6 μm to 1 μm.The research conducted can provide a technical basis for high-reso-lution linear displacement measurement studies while reducing the system volume and achieving high-reso-lution linear displacement measurement.关键词
球面光投影成像/图像式直线位移测量/高鲁棒性/高容错性/高分辨力Key words
spherical light projection imaging/image-based linear displacement measurement/high ro-bustness/high fault tolerance/high resolution分类
计算机与自动化引用本文复制引用
赵志财,于海,万秋华,梁立辉,张红鑫,曾琪峰..基于球面光投影成像的直线位移测量系统[J].光学精密工程,2025,33(4):532-541,10.基金项目
国家自然科学基金项目(No.52075520) （No.52075520）
吉林省自然科学基金项目(No.20230101111JC) （No.20230101111JC）
吉林省科技发展计划项目(No.20240302012GX) （No.20240302012GX）
