光学精密工程2025，Vol.33Issue(5)：716-727,12.DOI:10.37188/OPE.20253305.0716
基于近远场结合的微结构调制像差仿真
Simulation of sample induced aberration for microstructure based on near-far fields
摘要
Abstract
Coherence scanning interferometry(CSI)is widely employed for the measurement of micro-structure morphology due to its non-contact nature,low detection cost,high efficiency,and robust stabili-ty.However,when measuring the bottoms of high aspect ratio microstructures using CSI,challenges arise,such as the inability of the detection light to focus and diminished detection capabilities resulting from the sample's structure.This phenomenon is attributed to aberrations induced by the modulation of light by the sample.By conducting simulations,the aberration modulation characteristics of microstruc-tures was elucidated,thereby providing initial values for aberration correction and compensation,which en-hanced the measurement capabilities of CSI.The numerical calculation methods grounded in vector diffrac-tion efficiently characterized complex modulation phenomena,including occlusion,diffraction,multiple re-flections,and scattering of detection light,which were instigated by high aspect ratio microstructures.No-tably,these methods require substantial data,exhibit low computational efficiency,and pose challenges in establishing three-dimensional models.To mitigate these issues,a sample-induced aberration simulation approach that leverages both near-field and far-field methodologies was proposed in this paper.This ap-proach employed the Finite Difference Time Domain(FDTD)technique for full-wave simulation to com-pute the modulation process of high aspect ratio microstructures on the detection light field within a three-dimensional framework.The near-field distribution of the detection light modulated by the microstructure was obtained,followed by transmission to the far field using the band-limited scaling angle spectrum meth-od to assess the modulation aberration.Verification of the proposed method's accuracy was achieved through experimental measurements of modulation aberration across various samples.Simulation results further demonstrate that,under identical simulation conditions,the proposed method can enhance compu-tational speed more than twice.关键词
低相干显微干涉/样品调制像差/时域有限差分/带限缩放角谱/高深宽比微结构Key words
coherence scanning interferometry/sample induced aberration/finite difference time do-main/band-limit scaling angular spectrum/microstructure with high aspect ratio分类
物理学引用本文复制引用
鲍帅,高志山,霍霄,刘秋言,乔文佑,杨文卓,袁群,郭珍艳..基于近远场结合的微结构调制像差仿真[J].光学精密工程,2025,33(5):716-727,12.基金项目
国家自然科学基金资助项目(No.62327814,No.62175107,No.62205148) （No.62327814,No.62175107,No.62205148）
国家重点研发计划资助项目(No.2022YFF0706302,No.2023YFF0720601) （No.2022YFF0706302,No.2023YFF0720601）
江苏省高校青蓝工程 （）
