光学精密工程2025，Vol.33Issue(5)：741-750,10.DOI:10.37188/OPE.20253305.0741
多束电子源设计与实验
Design and experiment of multi-beam electron source
摘要
Abstract
To enhance the throughput of single-beam devices,such as scanning electron microscopes,a multi-beam electron source system utilizing a Schottky gun was developed.This study encompasses the design methodologies and fabrication processes for the collimator lens,aperture array,and micro-arrayed electrostatic lenses.The electrostatic collimator lens was designed based on the emission characteristics of the Schottky cathode,and the performance of the collimated beam was subsequently calculated.Aperture arrays,including configurations of 3×3 and 10×10 for beam splitting,were fabricated utilizing MEMS technology,and a high-precision assembly system was established to enable the assembly of micro-arrayed electrostatic lenses.Experiments concerning beam collimation,splitting,and focusing were conducted on a dedicated multi-beam electron source experimental platform,validating the performance of the 3×3 mul-tibeam electron source.Experimental results indicate that the collimated spot size was measured to be 600 μm with a beam current density of 4.11 A/m² and a uniformity of 6.06%.The average diameter of the fo-cused beamlet is recorded at 5.32 μm,accompanied by size uniformity of 5.91%,intensity uniformity of 4.36%,and pitch uniformity of 3.06%,all of which meet the design criteria of the multi-beam setup.关键词
电子光学/多束电子源/肖特基发射/准直透镜/微阵列单电位透镜Key words
electron optics/multi-beam electron source/Schottky emission/collimator lenses/micro-ar-rayed einzel lens分类
电子信息工程引用本文复制引用
赵伟霞,白凌超,张利新,刘俊标,殷伯华,韩立..多束电子源设计与实验[J].光学精密工程,2025,33(5):741-750,10.基金项目
中国科学院科研仪器设备研制项目(No.PTYQ2024BJ0004) （No.PTYQ2024BJ0004）
