光学精密工程2025，Vol.33Issue(5)：751-762,12.DOI:10.37188/OPE.20253305.0751
高陡度曲面光学元件的虚拟轴磁流变抛光
Virtual axis magnetorheological finishing of high-steepness curved optical elements
摘要
Abstract
In response to the technological constraints of traditional magnetorheological finishing ma-chines,which typically feature an upper-mounted polishing wheel and encounter difficulties in processing optical components with significant steepness,this study introduces a compound linkage polishing technol-ogy.This innovative approach integrates a fixed mechanical axis with a virtual axis and employs an under-mounted fixed polishing wheel.Initially,a post-processing model for the compound linkage polishing of both the mechanical and virtual axes is established,informed by the structural characteristics of the under-mounted fixed polishing wheel.The model is articulated using the Denavit-Hartenberg(DH)method and is subsequently validated through geometric analysis.The accuracy of the established post-processing model is further corroborated by conducting spot-picking experiments on a virtual shaft concave spherical surface and uni-form polishing experiments on a fused silica concave spherical surface,both with a diameter of 150 mm and a radius of curvature of 150 mm.Ultimately,a concave spherical surface crafted from molten fused silica,with a diameter of 170 mm,a radius of curvature of 158 mm,and a maximum normal angle of 32.54°,is polished and refined.Experimental results indicate that the PV value of the workpiece surface,with a trimming of 5 mm,converges to 0.04λ,while the RMS value converges to 0.005λ post-modification.These findings high-light that the proposed combined polishing model of the mechanical and virtual axes provides high precision and significantly enhances the processing capabilities for high-precision,high-gradient curved optical elements.This research contributes valuable insights into the application of magnetorheological polishing technology in the fab-rication of complex curved optical elements with high steepness.关键词
磁流变抛光/高陡度曲面/虚拟轴/下置式/后置处理Key words
magnetorheological finishing/high steepness surface/virtual axis/under-mounted/post-pro-cessing分类
机械工程引用本文复制引用
付志伟,周涛,张桂梅,谢炳贤,苏星,黄文,海阔..高陡度曲面光学元件的虚拟轴磁流变抛光[J].光学精密工程,2025,33(5):751-762,12.基金项目
国家重点研发计划资助项目(No.2022YFB3403402) （No.2022YFB3403402）
"某装备光束系统关键器件超精密加工制造生产线"项目(No.J0017-2326-QT) （No.J0017-2326-QT）
