航空科学技术2025，Vol.36Issue(4)：91-99,9.DOI:10.19452/j.issn1007-5453.2025.04.011
一种基于Al/Cu多层金属和应力波界面传递理论的高过载MEMS陀螺仪封装方法
A High Overload MEMS Gyroscope Packaging Method Based on Al/Cu Multilayer Metal and Stress Wave Interface Transfer Theory
摘要
Abstract
As an indispensable part of inertial guidance,high overload gyrosphere has a broad application scenario in the fields of aerospace and weapons.In this paper,a high overload gyroscope packaging method based on Al/Cu multilayer metal and stress wave interface transfer theory is proposed and designed,which is of great significance to solving the problem that inertial measurement devices fail under high overload environment during the launch of precision guided weapons.The package is mainly composed of ceramic,multilayer metal,glass substrate and sensitive structure from the outside to the inside.The effect of material properties on stress wave transmission amplitude was analyzed by means of analytical method and finite element numerical simulation,and the packaging form of MEMS gyro chip with the lowest stress wave transmission efficiency was obtained.The analysis shows that the attenuation effect of the designed package on stress wave reaches 80.5%.In addition,30000g@10ms overload simulation is carried out on the gyro chip and the gyro chip with Al/Cu multi-layer metal protection.It is obtained that the maximum stress of the gyro structure during overload process before and after protection is 271.15MPa and 56.40MPa respectively,which is reduced by 78.9%compared with that of the gyro chip.Finally,through the impact protection test of Hopkinson rod and Machete hammer,the attenuation effect of energy absorption device is 73.3%,and the impact resistance of gyroscope is increased by more than two times,which is consistent with the stress wave attenuation effect obtained by simulation and calculation.It is proved that the designed protective package has a certain protection effect on the gyroscope structure.It can ensure the normal operation of gyro after experiencing high overload,and has a reference significance for the protection of inertial devices under the overload of high kinetic energy weapons.关键词
高过载/MEMS/陀螺仪/应力波/封装/防护Key words
high overload/MEMS/gyroscope/stress wave/package/protection引用本文复制引用
郝博宇,曹慧亮,王宇..一种基于Al/Cu多层金属和应力波界面传递理论的高过载MEMS陀螺仪封装方法[J].航空科学技术,2025,36(4):91-99,9.基金项目
航空科学基金(201908U0002) Aeronautical Science Foundation of China(201908U0002) （201908U0002）
