机械科学与技术2025，Vol.44Issue(4)：632-640,9.DOI:10.13433/j.cnki.1003-8728.20230149
高效柔性气囊抛光工具的稳定性评价方法
Stability Evaluation Method of High-efficiency Flexible Bonnet Polishing Tool
摘要
Abstract
As the diameter of optical elements increases,the polishing time increases sharply.The evaluation of the process,especially the tool stability will directly affect the polishing convergence efficiency and accuracy.According to the working conditions of the high-efficiency flexible bonnet polishing tool in the actual polishing,an experimental study on the stability analysis and evaluation of the bonnet tool is carried out in this paper.The optimum structural design analysis and active wear experiment of the bonnet tool with a spherical cap radius of 160 mm are carried out,and the performance evaluation method in design and production is proposed and verified.When the amplitude of polishing force increases abruptly,the polishing spot should be detected.Then,the surface roughness is less than 500 nm and the removal depth is less than 1.5 μm,it proves that the bonnet tool has reached its working life.Using the present evaluation standard,the wear degree and stability of the bonnet tool bit in use can be accurately judged.关键词
柔性抛光/气囊工具/稳定性评价/优化设计Key words
flexible polishing/bonnet polishing tool/stability evaluation/optimized design分类
金属材料引用本文复制引用
李路骋,王振忠,黄雪鹏,刘祖辉..高效柔性气囊抛光工具的稳定性评价方法[J].机械科学与技术,2025,44(4):632-640,9.基金项目
国家自然科学基金项目(52075462) （52075462）
