科技创新与应用2025,Vol.15Issue(11):193-196,4.DOI:10.19981/j.CN23-1581/G3.2025.11.047
计量级磁悬浮转子真空计技术分析
贺栗1
作者信息
- 1. 深圳市计量质量检测研究院,广东 深圳 518073
- 折叠
摘要
Abstract
Since the application of magnetic levitation rotor vacuum gauge technology,it has been steadily advanced,but with the continuous development of science and technology and the increasing demand for measurement accuracy in industrial production,how to further improve the measurement accuracy and stability of magnetic levitation rotor vacuum gauge has become imperative.Based on this,starting from the analysis of metrological maglev rotor vacuum gauge,the structure of the metrological maglev rotor vacuum gauge is explored in detail,its advantages in the field of vacuum measurement are deeply analyzed,and the metrological maglev rotor vacuum gauge technology is deeply analyzed,aiming to further improve the performance and application effect of this technology and promote it to achieve high-precision and high-stability vacuum measurement in more fields.关键词
计量级/磁悬浮/转子/真空计/测量精度Key words
metrological/magnetic levitation/rotor/vacuum gauge/measurement accuracy分类
通用工业技术引用本文复制引用
贺栗..计量级磁悬浮转子真空计技术分析[J].科技创新与应用,2025,15(11):193-196,4.