吉林大学学报（信息科学版）2025，Vol.43Issue(2)：213-219,7.
基于微球超透镜的自混合干涉仪
Self-Mixing Interferometer Based on Microsphere Superlens
摘要
Abstract
A self-mixing interferometer based on microsphere superlens and edge filter is proposed to solve the problems of complex structure and large error of microvibration detection equipment.UV(Ultraviolet Curing Adhesive)glue is used to form a microsphere at the tip of the optical fiber probe.When the microsphere is irradiated by the optical fiber,PNJ(Photon Nanojet)phenomenon will appear.PNJ focuses on the surface of the target object to enhance the reflected light of the target object to the surface of the microsphere.The evanescent field generated by the photon nanojet plays an important role in enhancing and sharpening the nanovibration detection on the near-field surface.The amplitude modulated signal is converted into frequency modulated signal by Mach-Zender edge filter at the end of the sensor,and the signal-to-noise ratio is increased.Experimental results show that the reconstruction error of this method is 27 nm,which is of great significance for the miniaturization of optical devices.关键词
振动检测/光子纳米射流/马赫增德尔边缘滤波器/自混合干涉Key words
vibration detection/photon nanojet/mahzindel edge filter/self-mixing interference分类
电子信息工程引用本文复制引用
周业坤,高丙坤..基于微球超透镜的自混合干涉仪[J].吉林大学学报（信息科学版）,2025,43(2):213-219,7.基金项目
国家自然科学基金资助项目(61422301) （61422301）
