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基于压电陶瓷驱动的二维精密定位平台设计及分析

杜健 祝锡晶 李婧

工程设计学报2025,Vol.32Issue(2):199-207,9.
工程设计学报2025,Vol.32Issue(2):199-207,9.

基于压电陶瓷驱动的二维精密定位平台设计及分析

Design and analysis of two-dimensional precision positioning platform based on piezoelectric ceramic drive

杜健 1祝锡晶 1李婧1

作者信息

  • 1. 中北大学 机械工程学院,山西 太原 030051||先进制造技术山西省重点实验室,山西 太原 030051
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摘要

Abstract

In order to solve the problems of small displacement magnification,low output stiffness and excessive motion coupling displacement of flexible precision positioning platform,a two-dimensional precision positioning platform based on piezoelectric ceramic drive is proposed.Firstly,the statics modeling for the precision positioning platform was carried out by using the module method,elastic beam theory and flexibility matrix method,and the dynamics modeling was conducted by using the Lagrange equation.Then,the finite element simulation on the displacement magnification,output stiffness,coupling displacement and natural frequency of the precision positioning platform was carried out by ANSYS Workbench software.Finally,the performance parameters of the precision positioning platform were tested by constructing an experimental device,and comparative analyses were conducted with finite element simulation results and theoretical calculation results.The simulation and experimental results verified the accuracy of the statics model and dynamics model of the precision positioning platform,which showed that the designed precision positioning platform had advantages of large displacement magnification,high output stiffness and strong decoupling performance.The research results provide some theoretical guidance for the flexible precision positioning platform to realize large stroke displacement output and excellent decoupling capability.

关键词

精密定位平台/有限元仿真/固有频率/输出刚度

Key words

precision positioning platform/finite element simulation/natural frequency/output stiffness

分类

机械工程

引用本文复制引用

杜健,祝锡晶,李婧..基于压电陶瓷驱动的二维精密定位平台设计及分析[J].工程设计学报,2025,32(2):199-207,9.

基金项目

国家自然科学基金面上项目(51975540) (51975540)

工程设计学报

OA北大核心

1006-754X

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