发光学报2025，Vol.46Issue(4)：597-614,18.DOI:10.37188/CJL.20240271
ZnO基透明导电薄膜
ZnO-based Transparent Conductive Films
摘要
Abstract
ZnO is a typical third-generation semiconductor with a wide bandgap of 3.37 eV.Intrinsic ZnO is an n-type semiconductor,and the use of donor element doping technology can significantly enhance its n-type conductiv-ity.ZnO-based transparent conductive thin films have the advantages of abundant raw material sources,diverse prep-aration methods,and room temperature growth,which can be applied in many fields such as optoelectronics,sens-ing,photothermal,etc.Among them,Al doped ZnO(AZO)is a typical transparent conductive oxide(TCO),which has attracted much attention in recent years.This article takes AZO thin film as the main representative and summa-rizes the latest research progress of ZnO based transparent conductive films,including the physical and chemical properties of different types of transparent conductive thin films such as doped ZnO single-layer thin films,ZnO based multi-layer thin films,and flexible ZnO based thin films.We focus on the optoelectronic properties(e.g.,mo-bility,bandgap width,transmittance/absorption/reflectivity)of ZnO based transparent conductive films,exploring their inherent relationships.The practical applications are introduced in detail for ZnO based transparent conductive films in the fields of light-emitting diodes,solar cells,sensors,semiconductor heating,and so on.The existing chal-lenges and future development trends are also discussed.关键词
氧化锌/透明导电薄膜/施主掺杂/AZO/光电特性Key words
zinc oxide/transparent conductive film/donor doping/AZO/optoelectronic properties分类
数理科学引用本文复制引用
史钧达,杨汝琪,胡杜楠,刘如敏,余涛,吕建国..ZnO基透明导电薄膜[J].发光学报,2025,46(4):597-614,18.基金项目
浙江省"尖兵领雁+X"研发攻关计划(2024C01252(SD2))Supported by Zhejiang Provincial"Pioneer/Leading Goose+X"R&D Program(2024C01252(SD2)) （2024C01252(SD2）
