发光学报2025，Vol.46Issue(4)：730-741,12.DOI:10.37188/CJL.20240342
1 550 nm VCSEL硅基光电集成变迹光栅耦合器设计及入射角方向性优化研究
Design and Incident Angle Directionality Optimization of A Tapered Grating Coupler for 1 550 nm VCSEL-based Silicon Photonic Integration
摘要
Abstract
To overcome the limitations of symmetric uniform grating structures and enhance the coupling efficiency of on-chip light sources in silicon-based photonic integrated circuits(PICs),this study proposes a high-efficiency progressive grating coupler based on a silicon-on-insulator platform.This design is specifically suited for vertical-cav-ity surface-emitting lasers(VCSELs)bonded to silicon photonic ICs,reducing the technical challenges associated with bonding angle alignment.The method involves simultaneous adjustments to the grating period and duty cycle,along with optimization of etching depth,to better align the diffracted field with the Gaussian beam profile by refining the Bragg condition.To compare performance,uniform grating couplers with fixed periods and duty cycles,as well as front-end progressive grating couplers with fixed periods and varying duty cycles,are also studied.Results validate the pro-gressive grating superior performance,achieving coupling efficiencies of 54.62％(-2.63 dB)for the uniform grating,60.18％(-2.21 dB)for the front-end progressive grating,and 64.55％(-1.90 dB)for the proposed progressive design.The optimized structure demonstrates an angular tolerance of 6°-21°for the incident light source,significantly easing fab-rication challenges.The study confirms that the heterogeneous integration structure can achieve coupling efficiencies as high as 64.55％(-1.90 dB)without requiring a back reflector,while maintaining a wide angular tolerance.Experimen-tal results further reveal high coupling efficiency across the 1 500-1 600 nm wavelength range and consistent performance across varying fiber incident angles,highlighting the design's practicality and robustness for real-world applications.关键词
硅基光电集成/模式匹配/入射容差/耦合效率/光栅耦合器Key words
silicon photonic integrated/mode matching/incident angle tolerance/coupling efficiency/grating coupler分类
信息技术与安全科学引用本文复制引用
孙松伟,石琳琳,马超,邹永刚,范杰,付曦瑶,王玉坤..1 550 nm VCSEL硅基光电集成变迹光栅耦合器设计及入射角方向性优化研究[J].发光学报,2025,46(4):730-741,12.基金项目
吉林省科技厅自然科学基金面上项目(20240101350JC) （20240101350JC）
吉林省人社厅留学人员科技创新创业择优资助项目 （）
国家自然科学基金青年基金(62404023)Supported by Natural Science Foundation Project of Jilin Provincial Science and Technology Department(20240101350JC) （62404023）
Ji-lin Provincial Department of Human Resources and Social Security for Overseas Students Scientific and Technological Innova-tion and Entrepreneurship Merit-based Funding Project （）
National Natural Science Foundation of China(62404023) （62404023）
