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A Valuable and Low-Budget Process Scheme of Equivalized 1 nm Technology Node Based on 2D Materials

Yang Shen Zhejia Zhang Zhujun Yao Mengge Jin Jintian Gao Yuhan Zhao Wenzhong Bao Yabin Sun He Tian

纳微快报（英文）2025，Vol.17Issue(8)：294-305,12.
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纳微快报（英文）2025，Vol.17Issue(8)：294-305,12.DOI:10.1007/s40820-025-01702-7

A Valuable and Low-Budget Process Scheme of Equivalized 1 nm Technology Node Based on 2D Materials

A Valuable and Low-Budget Process Scheme of Equivalized 1 nm Technology Node Based on 2D Materials

Yang Shen 1Zhejia Zhang 2Zhujun Yao 3Mengge Jin 1Jintian Gao 3Yuhan Zhao 3Wenzhong Bao 4Yabin Sun 1He Tian3

作者信息

  • 1. College of Integrated Circuit Science and Engineering,Shanghai Key Laboratory of Multidimensional Information Processing,East China Normal University,Shanghai 200241,People's Republic of China
  • 2. State Key Laboratory of ASIC and System,School of Microelectronics,Fudan University,Shanghai 200433,People's Republic of China
  • 3. Institute of Microelectronics and Beijing National Research Center for Information Science and Technology(BNRist),Tsinghua University,Beijing 100084,People's Republic of China
  • 4. State Key Laboratory of ASIC and System,School of Microelectronics,Fudan University,Shanghai 200433,People's Republic of China||Shaoxin Laboratory,Shaoxing 312000,People's Republic of China
  • 折叠

摘要

关键词

Two-dimensional semiconductors/1 nm technology node/Nanosheet field-effect transistors/Complementary field-effect transistors/Horizontal scaling

Key words

Two-dimensional semiconductors/1 nm technology node/Nanosheet field-effect transistors/Complementary field-effect transistors/Horizontal scaling

引用本文复制引用

Yang Shen,Zhejia Zhang,Zhujun Yao,Mengge Jin,Jintian Gao,Yuhan Zhao,Wenzhong Bao,Yabin Sun,He Tian..A Valuable and Low-Budget Process Scheme of Equivalized 1 nm Technology Node Based on 2D Materials[J].纳微快报（英文）,2025,17(8):294-305,12.

基金项目

This work was supported in part by STI 2030—Major Projects under Grant 2022ZD0209200,in part by Beijing Natural Science Foundation-Xiaomi Innovation Joint Fund(L233009),in part by National Natural Science Foundation of China under Grant No.62374099,in part by the Tsinghua-Toy-ota Joint Research Fund,in part by the Daikin Tsinghua Union Program,in part by Independent Research Program of School of Integrated Circuits,Tsinghua University.This work was also spon-sored by CIE-Tencent Robotics X Rhino-Bird Focused Research Program. （L233009）

纳微快报（英文）

2311-6706

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