表面技术2025，Vol.54Issue(9)：1-17,17.DOI:10.16490/j.cnki.issn.1001-3660.2025.09.001
金刚石表面增透技术的研究进展
Research Progress of Anti-reflection Technology on Diamond Surface
摘要
Abstract
With exceptional thermal conductivity,wear resistance,and chemical stability,diamond exhibits excellent optical transmittance across a broad spectrum from 0.3 to 2.5 μm and over 6 μm.Consequently,it is considered an ideal material for high-power laser output windows and infrared optical windows.However,due to the high refractive index(n=2.42),the surface reflection loss is high on diamonds,which leads to the actual transmittance of diamonds falling short of theoretical expectations.Therefore,the high surface reflection restricts the application and prevalence of diamond as an optical window material.Coating anti-reflection film and constructing anti-reflection microstructure on diamond surfaces are two effective methods to improve diamond transmittance. Firstly,the basic principles of the two diamond transmittance enhancement methods are introduced.The anti-reflection film on the diamond surface makes the reflected light on the diamond surface interfere and cancel each other by adjusting the composition,thickness,and structure of the film,to achieve the anti-reflection effect.On the other hand,the anti-reflection microstructure forms a subwavelength microstructure on the diamond surface,which can not be distinguished by incident light,and the structure layer can be equivalent to a graded refractive index film,which can reduce the reflection caused by the sudden change of refractive index and achieve anti-reflection effect.Then,the common preparation methods of anti-reflection film and anti-reflection microstructure on the diamond surface are described.The deposition methods of the anti-reflection film are classified into physical and chemical vapor deposition,mainly including evaporation,magnetron sputtering and chemical vapor deposition(CVD),and the preparation methods of anti-reflection microstructure include silicon replication,laser processing,and ion etching and the advantages and disadvantages of the above preparation methods are also summarized.Then,the research progress of the two transmittance enhancement methods is further discussed,and the transmittance enhancement effects of the two methods are reviewed.The effects of single-layer,double-layer,and multi-layer antireflection films and anti-reflection microstructure on the transmittance of diamonds are analyzed in detail.The single-layer anti-reflection film can achieve transmission in a fixed wavelength band,and the double-layer anti-reflection film can further enhance the transmittance in the target wavelength band,but the transmittance on both sides of the target wavelength band is not as effective as that of the single-layer film.The multi-layer anti-reflection film can achieve high transmittance,wide band transmission,and wide angle of incidence,and has the best anti-reflection effect,but with the increase of the number of layers,the problem of poor adhesion between the film systems becomes more and more serious,and the performance of multi-layer anti-reflection transmission film will be seriously limited.The anti-reflection microstructure also has the advantages of a good anti-reflection effect and wide anti-reflection band,but it is difficult to process and the actual optical transmittance is low.Therefore,increasing the adhesion between the multi-layer anti-reflection film system and accurately processing the designed anti-reflection microstructure will be key development directions in the future. At present,based on the anti-reflection film and anti-reflection microstructure technology,the optical transmittance of diamonds has been effectively improved,but many problems need to be solved to realize the practical application of diamonds in optical windows and other fields,including the preparation process,performance,durability,and damage resistance of anti-reflection film and anti-reflection microstructure,so the path to optimization is still challenging.Therefore,optimizing the preparation process,improving the adhesion and stability of the anti-reflection film system,and enhancing the actual transmittance of the anti-reflection microstructure are the key development trends of diamond anti-reflection research in the future.关键词
金刚石/光学窗口/增透膜/微结构/折射率/透过率Key words
diamond/optical window/anti-reflection film/microstructure/refractive index/transmittance引用本文复制引用
刘朝平,西村一仁,孟彬,袁其龙,王跃忠,宋惠,孙鹏,尚鹏,李赫,江南..金刚石表面增透技术的研究进展[J].表面技术,2025,54(9):1-17,17.基金项目
国家重点研发计划-青年科学家项目(2022YFB3607900) （2022YFB3607900）
国家自然科学基金(52302202) （52302202）
宁波市重大科技任务攻关项目(2021Z123) （2021Z123）
宁波市甬江市人才引进计划(2021A-037-C,2021A-108-G) （2021A-037-C,2021A-108-G）
中国科学院青年基金(JCPYJJ-22030) （JCPYJJ-22030）
天津市自然科学基金重点项目(23JCZDJC00150) （23JCZDJC00150）
河北省自然科学基金(F2022103002) National Key Research and Development Program of China-Youth Scientist Project(2022YFB3607900) （F2022103002）
National Natural Science Foundation of China(52302202) （52302202）
Science and Technology Major Project of Ningbo(2021Z123) （2021Z123）
Yongjiang Talent Introduction Programme of Ningbo(2021A-037-C,2021A-108-G) （2021A-037-C,2021A-108-G）
Youth Fund Project of the Chinese Academy of Sciences(JCPYJJ-22030) （JCPYJJ-22030）
Key Program of Tianjin Natural Science Foundation(23JCZDJC00150) （23JCZDJC00150）
Natural Science Foundation of Hebei Province(F2022103002) （F2022103002）
