分析测试学报2025，Vol.44Issue(5)：844-852,9.DOI:10.12452/j.fxcsxb.240729260
三重四极杆电感耦合等离子体质谱法测定电子级磷酸中29种痕量杂质元素
Determination of 29 Trace Impurity Elements in Electronic-grade Phosphoric Acid Using Triple-quadrupole Inductively Coupled Plasma Mass Spectrometry
摘要
Abstract
A method for determining the content of 29 trace impurity elements in electronic-grade phosphoric acid using triple-quadrupole inductively coupled plasma mass spectrometry(ICP-MS)in an ultra-clean environment was established.The use of a Class 100 cleanroom and a dynamic Class 10 sample introduction chamber effectively controlled contamination.By optimizing instrument param-eters,the element response intensity was improved,and the oxide conversion rate was reduced to avoid mass spectrometric interference caused by oxide ions.The standard addition method was used to match the matrix effect,and a combination of multiple reaction modes including He mode,O2 mode,and Cool-NH3 mode was employed.This effectively avoided various polyatomic ion interfer-ences generated from Ar plasma and phosphoric acid matrix side reactions,reduced the method de-tection limits,and improved quantitative accuracy.The results showed that the linear correlation co-efficients for the 29 trace elements were all greater than 0.998 in the range of 0-100 ng/kg,the meth-od detection limits in 1%(w/w)phosphoric acid solutions ranged from 0.03 to 3.39 ng/kg,the spiked recoveries were 77.6%to 112%,and the stability RSD was not more than 7.0%.These results are reliable and meet the requirements for determining electronic-grade phosphoric acid used in ad-vanced processes.关键词
三重四极杆电感耦合等离子体质谱法(ICP-MS/MS)/电子级磷酸/痕量元素/先进制程Key words
triple-quadrupole inductively coupled plasma mass spectrometry(ICP-MS/MS)/elec-tronic-grade phosphoric acid/trace elements/advanced production process分类
化学引用本文复制引用
王佳鼎,唐高,鹿燕,卢珩俊,叶涛,石瑞瑞..三重四极杆电感耦合等离子体质谱法测定电子级磷酸中29种痕量杂质元素[J].分析测试学报,2025,44(5):844-852,9.基金项目
浙江省教育厅科研资助项目(Y202353765) （Y202353765）
浙江省市场监管局"雏鹰计划"培育项目(CY2022005) （CY2022005）
