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Topology-optimized 2D silicon-air phononic crystal slabs for enhancing quality factor of laterally vibrating resonators

Zihao Xie Yongqing Fu Jin Xie

纳米技术与精密工程（英文）2025，Vol.8Issue(1)：36-44,9.

纳米技术与精密工程（英文）2025，Vol.8Issue(1)：36-44,9.DOI:10.1063/10.0028829

Topology-optimized 2D silicon-air phononic crystal slabs for enhancing quality factor of laterally vibrating resonators

Zihao Xie ¹Yongqing Fu ²Jin Xie¹

作者信息

1. State Key Laboratory of Fluid Power and Mechatronic Systems,Zhejiang University,Hangzhou 310027,China
2. Faculty of Engineering and Environment,University of Northumbria,Newcastle upon Tyne NE18ST,United Kingdom
折叠

摘要

关键词

Laterally vibrating resonators/Phononic crystal slabs/Topology optimization/Quality factor

Key words

Laterally vibrating resonators/Phononic crystal slabs/Topology optimization/Quality factor

引用本文复制引用

Zihao Xie,Yongqing Fu,Jin Xie..Topology-optimized 2D silicon-air phononic crystal slabs for enhancing quality factor of laterally vibrating resonators[J].纳米技术与精密工程（英文）,2025,8(1):36-44,9.

基金项目

This work is supported by the National Natural Science Foundation of China(Grant No.52175552)and the National Key RD Program of China(Grant Nos.2022YFB3205400 and 2022YFB3204300). （Grant No.52175552）

纳米技术与精密工程（英文）

ISSN：1672-6030

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