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Fabrication of high-quality surface microtextures on GaN by femtosecond laser direct writing

Rushuai Hua Zongwei Xu Zhixiang Tao Bing Dong Hong Wang Long Yang

纳米技术与精密工程（英文）2025，Vol.8Issue(1)：45-57,13.

纳米技术与精密工程（英文）2025，Vol.8Issue(1)：45-57,13.DOI:10.1063/10.0028760

Fabrication of high-quality surface microtextures on GaN by femtosecond laser direct writing

Rushuai Hua ¹Zongwei Xu ¹Zhixiang Tao ¹Bing Dong ¹Hong Wang ²Long Yang¹

作者信息

1. State Key Laboratory of Precision Measuring Technology and Instruments,Laboratory of Micro/Nano Manufacturing Technology,Tianjin University,Tianjin 300072,China
2. State Key Laboratory of Separation Membranes and Membrane Processes,Tiangong University,Tianjin 300387,China
折叠

摘要

关键词

Femtosecond laser/Laser processing/Texture/GaN/Raman

Key words

Femtosecond laser/Laser processing/Texture/GaN/Raman

引用本文复制引用

Rushuai Hua,Zongwei Xu,Zhixiang Tao,Bing Dong,Hong Wang,Long Yang..Fabrication of high-quality surface microtextures on GaN by femtosecond laser direct writing[J].纳米技术与精密工程（英文）,2025,8(1):45-57,13.

基金项目

This work is financially supported by the Henan Key Labora-tory of Intelligent Manufacturing Equipment Integration for Super-hard Materials(Grant No.JDKJ2022-01),the National Natural Sci-ence Foundation of China(Grant Nos.52035009 and 51761135106),the 2020 Mobility Programme of the Sino-German Center for Research Promotion(Grant No.M-0396),and the"111"project by the State Administration of Foreign Experts Affairs and the Ministry of Education of China(Grant No.B07014). （Grant No.JDKJ2022-01）

纳米技术与精密工程（英文）

ISSN：1672-6030

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