光学精密工程2025，Vol.33Issue(6)：850-861,12.DOI:10.37188/OPE.20253306.0850
双镜面物体共基准形位测量
Double-specular-surface metrology by common benchmark calibration method
摘要
Abstract
In order to simultaneously measure the 3D shape and relative position between two working sur-faces of the double-specular-surface objects,we established a common benchmark metrology measurement system based on direct phase measuring deflectometry.To complete system calibration and common benchmark calibration,we designed and fabricated a double-specular-surface calibration plate.First,we calibrated the two subsystems forming the common benchmark morphology measurement system in depth and lateral direction.This established the relationship between absolute phase and depth,pixel coordinates and spatial coordinates X,Y.Next,to avoid the problem of low calibration accuracy caused by the manu-facturing error of the double-specular-surface calibration plate,we performed common benchmark calibra-tion to take advantage of the spatial constraint relationship.This allowed us to convert 3D point clouds lo-cated in different coordinate systems to a unified coordinate system.Finally,we conducted practical exper-iments on specular-surface steps and a high-precision measuring block using the common benchmark me-trology measurement system.Based on the experimental results,the following conclusions are drawn:the root mean square error of distance between the two surfaces of the measuring block is 0.076 mm,which shown that the proposed common benchmark calibration method is effective in obtaining the double-specu-lar-surface metrology;the maximum absolute error in distance between two adjacent surfaces of the specu-lar surface steps is 0.032 mm,which shown that the error caused by common benchmark calibration reduc-es the measurement accuracy of the common benchmark metrology measurement system.To improve the accuracy of the common benchmark metrology measurement system,subsequent studies will optimize the common benchmark calibration method.关键词
相位偏折测量术/双镜面物体/共基准/镜面面形Key words
phase measuring deflectometry/double-specular-surface objects/common benchmark/spec-ular surface metrology分类
计算机与自动化引用本文复制引用
何雯静,倪育博,高楠,孟召宗,杨泽青,张国锋,尹伟,赵洪伟,张宗华..双镜面物体共基准形位测量[J].光学精密工程,2025,33(6):850-861,12.基金项目
国家自然科学基金项目(No.U2341275,No.52075147) （No.U2341275,No.52075147）
河北省教育厅科学研究项目(No.JZX2024021) （No.JZX2024021）
