光学精密工程2025，Vol.33Issue(6)：905-915,11.DOI:10.37188/OPE.20253306.0905
硅反射靶增强的飞秒激光融石英微半球谐振子释放技术
Femtosecond laser fused silica microhemispherical resonator release enhanced by a silicon reflective target
摘要
Abstract
The fused silica micro-hemisphere resonator gyroscope is one of the most promising miniature vibratory gyroscopes,offering advantages such as a simple structure,high precision,and strong anti-inter-ference capability.The micro-hemisphere resonator is the core component of the gyroscope,and its fabri-cation process is critical for performance.This study proposed a method to improve release quality while maintaining processing efficiency.In this study,a femtosecond laser was used for the release process,with the laser focused on the lower surface of the fused silica resonator through a silicon reflective target placed beneath it.This setup enhanced the intensity of the femtosecond laser inside the material,improv-ing both the release speed and surface quality.A simplified mathematical model for laser intensity distribu-tion inside fused silica and FDTD simulations were employed to analyze the laser energy field during fem-tosecond laser processing.The optimal process parameters were determined from the analysis.Experi-mental results show that when the single pulse energy is set at 2.2 μJ and the release speed is between 0.2 mm/s and 0.5 mm/s,a 300 μm thick quartz sheet was released with a release width ranging from 34.31 μm to 35.16 μm,and a surface roughness less than 400 nm.The release width increased by approx-imately 236%compared to the conventional focusing on the upper surface.This method effectively im-proves the release quality of the micro-hemisphere resonator,providing a solid technical foundation for the fabrication of high-quality fused silica resonators.关键词
飞秒激光释放/融石英/反射靶材/FDTD仿真Key words
femtosecond laser release/fused silica/reflective target/curve fitting/Finite-Difference Time-Domain(FDTD)simulation分类
电子信息工程引用本文复制引用
庄须叶,乔琦,高忠峰,韩诗林,胡友旺,李平华..硅反射靶增强的飞秒激光融石英微半球谐振子释放技术[J].光学精密工程,2025,33(6):905-915,11.基金项目
泰山学者青年专家项目(No.tsqn201909108) （No.tsqn201909108）
山东省自然基金面上项目(No.ZR2021MF042) （No.ZR2021MF042）
