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激光跟踪仪主动对准式复合传感高精度姿态测量

程智 董登峰 李洋 邱启帆 王建国 霍汉林 黄云鹏 周维虎

光学精密工程2025,Vol.33Issue(7):1007-1018,12.
光学精密工程2025,Vol.33Issue(7):1007-1018,12.DOI:10.37188/OPE.20253307.1007

激光跟踪仪主动对准式复合传感高精度姿态测量

High-precision attitude measurement with active aiming composite sensing for laser tracker

程智 1董登峰 1李洋 2邱启帆 3王建国 1霍汉林 2黄云鹏 1周维虎1

作者信息

  • 1. 中国科学院 微电子研究所,北京 100029||中国科学院大学,北京 101408
  • 2. 中国科学院 微电子研究所,北京 100029
  • 3. 中国科学院 微电子研究所,北京 100029||南京航空航天大学 自动化学院,江苏 南京 211106
  • 折叠

摘要

Abstract

To address the requirements of quality inspection and assembly process control in large-scale high-end equipment manufacturing,an active aiming-based attitude measurement target for laser trackers was developed.A comprehensive mathematical model for attitude measurement was established,accom-panied by parameter calibration procedures and nonlinear error compensation methods.The structural com-position,operational principles,coordinate system definitions,and data acquisition and preprocessing tech-niques of the active aiming target were systematically presented.Attitude-solving models were constructed based on constraints derived from laser beam vectors and gravitational vectors.Furthermore,a feedfor-ward neural network was employed to compensate for nonlinear errors inherent in the model-derived atti-tude data.Calibration strategies for parameter matrices and neural network training were formulated and evaluated.Experimental validation,including parameter calibration and attitude measurement,was per-formed using the active aiming target.The results indicate that within a 15 m range,the root-mean-square deviation between the proposed target and a Leica T-MAC sensor is 0.030°,satisfying the precision re-quirements for typical industrial large-scale attitude measurements.

关键词

姿态测量/激光跟踪仪/参数融合/主动对准/惯性传感

Key words

attitude measurement/laser tracker/parameter fusion/active aiming/inertial sensing

分类

机械工程

引用本文复制引用

程智,董登峰,李洋,邱启帆,王建国,霍汉林,黄云鹏,周维虎..激光跟踪仪主动对准式复合传感高精度姿态测量[J].光学精密工程,2025,33(7):1007-1018,12.

基金项目

国家重点研发计划资助项目(No.2023YFB4706700) (No.2023YFB4706700)

光学精密工程

OA北大核心

1004-924X

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