光学精密工程2025，Vol.33Issue(7)：1019-1030,12.DOI:10.37188/OPE.20253307.1019
基于双棱镜的全视场外差干涉测量
Full-field heterodyne dynamic interferometric measurement with double-prism configuration
摘要
Abstract
To improve measurement applicability and reduce the impact of stray light and frequency mix-ing on interferometric results,a high-precision,low-noise dynamic interferometric measurement system is proposed.This system is based on a novel double-prism dynamic interferometer design,suitable for full-field heterodyne dynamic interferometric measurement techniques.It addresses the effects of frequency mixing on measurement results,further mitigates the influence of stray light,and utilizes ideal fiber-optic output to replace the reference surface,thereby avoiding the impact of reference surface nonuniformity on measurement accuracy.This paper explains the basic configuration of the interferometer,describes the measurement principles,models and simulates stray light in the new double-prism structure,provides addi-tional analysis on frequency mixing errors,and presents experimental validation of stray light and frequen-cy mixing effects.Experimental results show that the stray light in the divergent structure differ by up to an order of magnitude of 3.2 compared to those in the parallel light structure.This configuration is free from frequency mixing effects.When measuring a component with a 3%reflectivity,the introduced surface shape measurement error is less than 0.015 5λ relative to the Twyman-Green configuration,which is con-sistent with simulation results.The full-field heterodyne dynamic measurement technique based on the dou-ble-prism configuration enhances measurement applicability,reduces the impact of stray light frequency mixing on low-frequency measurement results,suppresses the effects of frequency mixing,and further im-proves the measurement accuracy of the interferometer.关键词
干涉测量/双棱镜构型/全视场外差/寄生波/混频Key words
interferometric measurement/double-prism configuration/full-field heterodyne/stray light/frequency mixing分类
物理学引用本文复制引用
焦琪璐,朱聪慧,吕彤,伍洲,张文喜..基于双棱镜的全视场外差干涉测量[J].光学精密工程,2025,33(7):1019-1030,12.基金项目
中国科学院科研仪器设备研制项目(No.PTYQ2024TD0036) （No.PTYQ2024TD0036）
