光学精密工程2025，Vol.33Issue(7)：1091-1099,9.DOI:10.37188/OPE.20253307.1091
高信噪比荧光检测微反射器零模波导器件的研制
Development of zero-mode waveguide device with micro-reflector for high signal-to-noise fluorescence detection
摘要
Abstract
This study addresses the limitations of low signal collection efficiency and suboptimal signal-to-noise ratio in zero-mode waveguide(ZMW)devices employed for fluorescence detection.A micro-reflec-tor ZMW device was designed and fabricated to enhance the signal-to-noise ratio in fluorescence measure-ments.Finite element electromagnetic simulations demonstrated a significant improvement in the spatial distribution and intensity of excitation and emission fields within the device.The ZMW apertures and a three-stage micro-reflector structure,with a height of 6.48 μm and a bottom diameter of 4.24 μm,were fabricated using a thick adhesive process followed by exposure etching,complemented by focused ion beam perforation and additional micro-nano fabrication techniques.Fluorescence performance was evalu-ated using fluorescent microspheres,and detection efficiency was assessed through fluorescence imaging.Quantitative analysis of grayscale intensity and signal-to-noise ratio revealed that the developed device achieved a fluorescence detection signal-to-noise ratio of 119.6,representing an approximate 4.27-fold enhancement compared to conventional ZMW devices without the micro-reflector.This high signal-to-noise ratio ZMW device demonstrates significant potential for applications in weak fluorescence detection and related fields.关键词
零模波导/微反射器/信噪比/荧光信号检测Key words
zero-mode waveguide/micro-reflector/signal-to-noise ratio/fluorescence signal detection分类
计算机与自动化引用本文复制引用
刘轩硕,李传宇,焦春笑,黄润虎,周连群,郭振..高信噪比荧光检测微反射器零模波导器件的研制[J].光学精密工程,2025,33(7):1091-1099,9.基金项目
江苏省前沿技术研发计划资助项目(No.BF2024030) （No.BF2024030）
江苏省高端医疗器械技术创新中心项目(No.BM2022012) （No.BM2022012）
