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Piezo-actuated smart mechatronic systems for extreme scenarios

Zhongxiang Yuan Xiaoqing Li Shuliu Zhou Cailin Hong Ziyu Xiao Zhengguang Zhang Xuedong Chen Lizhan Zeng Jiulin Wu Yunlong Wang

极端制造（英文）2025，Vol.7Issue(2)：70-118,49.

极端制造（英文）2025，Vol.7Issue(2)：70-118,49.DOI:10.1088/2631-7990/ad9366

Piezo-actuated smart mechatronic systems for extreme scenarios

Zhongxiang Yuan ¹Xiaoqing Li ²Shuliu Zhou ²Cailin Hong ²Ziyu Xiao ²Zhengguang Zhang ²Xuedong Chen ²Lizhan Zeng ²Jiulin Wu ²Yunlong Wang²

作者信息

1. State Key Laboratory of Intelligent Manufacturing Equipment and Technology,School of Mechanical Science and Engineering,Huazhong University of Science and Technology,Wuhan 430074,People's Republic of China||Institute of Artificial Intelligence,Huazhong University of Science and Technology,Wuhan 430074,People's Republic of China
2. State Key Laboratory of Intelligent Manufacturing Equipment and Technology,School of Mechanical Science and Engineering,Huazhong University of Science and Technology,Wuhan 430074,People's Republic of China
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摘要

关键词

piezoelectric actuator/nanopositioning system/high-end equipment/extreme scenarios/piezo-actuated smart mechatronic system

Key words

piezoelectric actuator/nanopositioning system/high-end equipment/extreme scenarios/piezo-actuated smart mechatronic system

引用本文复制引用

Zhongxiang Yuan,Xiaoqing Li,Shuliu Zhou,Cailin Hong,Ziyu Xiao,Zhengguang Zhang,Xuedong Chen,Lizhan Zeng,Jiulin Wu,Yunlong Wang..Piezo-actuated smart mechatronic systems for extreme scenarios[J].极端制造（英文）,2025,7(2):70-118,49.

基金项目

This research is financially supported by the National Key R&D Program of China(Grant No.2022YFC2204203)and the National Natural Science Foundation of China(Grant No.52305107).We are grateful to Dr Yangli Fu for her valuable contributions to the preparation and English language editing of the manuscript.Our sincere thanks also go to the editors and reviewers for their dedicated time and effort in reviewing our work. （Grant No.2022YFC2204203）

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