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Femtosecond laser micro/nano processing:from fundamental to applications

Le Gao Qiming Zhang Min Gu

极端制造（英文）2025，Vol.7Issue(2)：335-385,51.

极端制造（英文）2025，Vol.7Issue(2)：335-385,51.DOI:10.1088/2631-7990/ad943e

Femtosecond laser micro/nano processing:from fundamental to applications

Le Gao ¹Qiming Zhang ¹Min Gu¹

作者信息

1. School of Artificial Intelligence Science and Technology,University of Shanghai for Science and Technology,Shanghai 200093,People's Republic of China||Institute of Photonic Chips,University of Shanghai for Science and Technology,Shanghai 200093,People's Republic of China
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摘要

关键词

femtosecond laser/laser micro/nano processing/laser fabrication/direct laser writing/3D laser lithography

Key words

femtosecond laser/laser micro/nano processing/laser fabrication/direct laser writing/3D laser lithography

引用本文复制引用

Le Gao,Qiming Zhang,Min Gu..Femtosecond laser micro/nano processing:from fundamental to applications[J].极端制造（英文）,2025,7(2):335-385,51.

基金项目

This work was financially supported by National Key R&D Program of China(Grant Nos.2021YFB2802000 and 2022YFB2804300),the Science and Technology Commission of Shanghai Municipality(Grant No.21DZ1100500),the Shanghai Municipal Science and Technology Major Project,the Shanghai Frontiers Science Center Program(2021-2025 No.20),the National Natural Science Foundation of China(Grant No.61975123)and the Shanghai Science and Technology Innovation Action Plan(Grant No.23JC1403100). （Grant Nos.2021YFB2802000 and 2022YFB2804300）

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