量子电子学报2025，Vol.42Issue(3)：381-390,10.DOI:10.3969/j.issn.1007-5461.2025.03.010
基于高精密腔的高灵敏臭氧探测技术研究
Research on highly sensitive ozone detection technology based on high precision cavity
摘要
Abstract
In this study,a highly sensitive ozone detection system based on high precision cavity technology was developed.A deep ultraviolet light-emitting diode(DUV-LED)with a center wavelength of 266 nm was used as light source,and an optical cavity with a length of 30 cm was constructed with two high reflectance mirrors with a reflectivity of 99.7%,which achieved an effective absorbing optical path of 84.7 m.Firstly,the stability of the DUV-LED light source and the interference of other gases at the center wavelength were investigated,and the effective cavity length and the cavity extinction value of the system were calibrated.Then,the performance of the system was evaluated using Allan variance,and it showed that the integrated system had a detection limit of 129×10-12(1σ)for O3 at a time resolution of 1 s,with a total system uncertainty of 6.2%.Finally,to verify the environmental adaptability and stability of the system,the system was employed in a continuous 3 d comprehensive field observation at Hefei Science Island(China),and compared with the commercial instrument Thermo-49i.The observation results show that the O3 concentrations measured by the two systems have good consistency,with a correlation coefficient of 0.98,a slope of 1.01,and an intercept of 0.75.The consistency verifies the accuracy and reliability of the system in measuring O3,proving that the system can be applied to accurate measurement of O3 with high sensitivity and high time resolution in real environments.关键词
大气光学/臭氧探测/高精密腔技术/深紫外发光二极管Key words
atmospheric optics/ozone detection/high precision cavity technology/deep ultraviolet light-emitting diode分类
数理科学引用本文复制引用
刘孟辉,童金钊,林川,黄晨光,谢品华..基于高精密腔的高灵敏臭氧探测技术研究[J].量子电子学报,2025,42(3):381-390,10.基金项目
国家自然科学基金重点项目(42030609) （42030609）
