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基于一阶应力补偿的霍尔电流传感器设计

高林兴 龙强 朱明

无线电工程2025,Vol.55Issue(5):1093-1104,12.
无线电工程2025,Vol.55Issue(5):1093-1104,12.DOI:10.3969/j.issn.1003-3106.2025.05.022

基于一阶应力补偿的霍尔电流传感器设计

Design of a Hall Current Sensor Based on First-order Stress Compensation

高林兴 1龙强 2朱明1

作者信息

  • 1. 安徽大学集成电路学院,安徽 合肥 230601
  • 2. 华东光电集成器件研究所,安徽 蚌埠 233030
  • 折叠

摘要

Abstract

To address the sensitivity drift of Hall current sensors caused by stress,a Hall current sensor integrated with stress and temperature sensors is designed.The normal stress within the plane is detected by the stress sensor,and a compensation current proportional to the stress is generated and superimposed onto the Hall plate's supply current to compensate for magnetic sensitivity drift.In addition,thermal sensitivity calibration is performed at three temperature points to reduce the residual thermal drift of the temperature-dependent stress sensor.The chip area is measured as 2.5 mm × 1.5 mm.Experimental results demonstrate that the first-order stress-compensated chip achieves a stress-related sensitivity drift of less than 0.5%and a residual thermal drift of less than 0.2%over the temperature range of-40~125 ℃.These values are significantly improved compared to conventional designs,making the chip suitable for high-precision current sensing applications.

关键词

霍尔电流传感器/磁灵敏度漂移/一阶应力补偿/模拟集成电路

Key words

Hall current sensor/magnetic sensitivity drift/first-order stress compensation/analog integrated circuit

分类

信息技术与安全科学

引用本文复制引用

高林兴,龙强,朱明..基于一阶应力补偿的霍尔电流传感器设计[J].无线电工程,2025,55(5):1093-1104,12.

基金项目

安徽高校协同创新项目(GXXT-2022-080)The University Synergy Innovation Program of Anhui Province(GXXT-2022-080) (GXXT-2022-080)

无线电工程

1003-3106

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