中国机械工程2025，Vol.36Issue(5)：889-897,9.DOI:10.3969/j.issn.1004-132X.2025.05.001
多频磁场耦合的绝对式直线时栅位移传感器研究
Study on Absolute Linear Time-grid Displacement Sensors with Multi-frequency Magnetic Field Coupling
摘要
Abstract
Aiming at the problems of mutual crosstalk among magnetic fields affecting the meas-urement accuracy of the sensors and reducing the signal-to-noise ratio when the excitation frequency of two code channels of a dual-row planar magnetic field sensor was the same,a multi-frequency magnet-ic field coupled absolute linear time-grid displacement sensor design scheme was proposed,which achieved the solution to the problems of eliminating the crosstalk of the magnetic fields among the code channels while solving the absolute displacement.The sensor was divided into fixed scale and dynamic scale,both using double-layer alternating structure,fixed scale using two columns of incre-mental code channel combination,divided into fine and coarse machines,the pairs of poles of two rows of excitation coils were two integers of the reciprocal relation,the absolute displacement meas-urement was realized by using the pairs of poles within the displacement difference.Precision machine measurement channel and rough machine measurement channel were input different frequencies of the excitation current signals at the same time,the precision machine was input the 1 MHz high-frequency current signals,the high-frequency excitation current signals might effectively enhance the inductive signals,improve the signal-to-noise ratio of the electrical processing system.Through the method of outlier frequency reduction,the sensor resolution was improved,which effectively solved the prob-lems that it were difficult to reconcile the signal-to-noise ratio enhancement of the signals by increasing the frequency of the excitation signals and the high resolution of the sensors.Theoretical validation and error analysis of the sensors were carried out through electromagnetic simulation analysis.Final-ly,the experimental platform was built to carry out prototype experiments,and the experimental results show that the absolute sensor structure with multi-frequency magnetic field coupling effectively eliminates the magnetic field crosstalk between the fine and coarse machines,and the signal-to-noise ratio of the sensors is improved,with measurement errors are less than±17.34μm in the measurement range of 140 mm.关键词
绝对位移测量/多频磁场耦合/信噪比/位移传感器Key words
absolute displacement measurement/multi-frequency magnetic field coupling/signal-to-noise ratio/displacement sensor分类
机械工程引用本文复制引用
杨继森,袁俊松,修府,刘嘉诚,张小龙..多频磁场耦合的绝对式直线时栅位移传感器研究[J].中国机械工程,2025,36(5):889-897,9.基金项目
国家自然科学基金(52175454) （52175454）
重庆市高等学校优秀人才支持计划 （）
重庆市自然科学基金(CSTB2023NSCQ-MSX0382) （CSTB2023NSCQ-MSX0382）
重庆市教委科学技术研究计划重点项目(KJZD-K202301106) （KJZD-K202301106）
