传感技术学报2025，Vol.38Issue(5)：765-769,5.DOI:10.3969/j.issn.1004-1699.2025.05.001
一种基于法布里-珀罗干涉原理的高精度位移传感器
High Precision Displacement Sensor Based on Fabry-Perot Interference
摘要
Abstract
A fiber-optic displacement sensor based on the principle of extrinsic Fabry-Perot interference(EFPI)is proposed and demon-strated with a range of up to 20 mm and a resolution of±0.1 μm.The key feature of the sensor is to convert a large displacement change into a small change in the length of the interference cavity through an inclined structure,so that when the displacement changes by 20 mm,the change in the length of the interference cavity does not exceed 0.6 mm,and the sensor has excellent linearity and low temperature sen-sitivity.The new optical fiber sensor has the advantages of good mechanical robustness,simple structure,long service life,low cost and high resolution.It is expected to be applied in the fields of structural joint measurement in water conservancy,architecture and geotechni-cal engineering.关键词
位移传感器/法布里-珀罗干涉/光纤/斜面结构Key words
displacement sensor/Fabry-Perot interference/optical fiber/inclined structure分类
计算机与自动化引用本文复制引用
陈艺征,唐艳,蒋西平,鞠登峰,梁云,龙英凯..一种基于法布里-珀罗干涉原理的高精度位移传感器[J].传感技术学报,2025,38(5):765-769,5.基金项目
国家电网公司科技项目(5108-202218280A-2-417-XG) （5108-202218280A-2-417-XG）
