分析化学2025，Vol.53Issue(5)：758-764,7.DOI:10.19756/j.issn.0253-3820.251047
一种基于微机电系统的具有三明治结构的开关型气动微阀
A Pneumatic Micro-valve with Sandwich Structure Based on Micro-electro-mechanical System
摘要
Abstract
In this study,an ON/OFF type micro-valve with a sandwich(glass-silicon-glass)structure was designed and fabricated based on the micro-electro-mechanical system(MEMS)technique.The deformable membrane of this micro-valve was prepared on the silicon on insulator(SOI)substrate and sealed using Si-Si bonding and anodic bonding methods.The micro-valve had high-temperature stability and was suitable for integration with other gas chromatography components.The deformable membrane with a thickness of 10 μm was processed on the top silicon of the SOI substrate.The flow control of the micro-valve could be achieved by changing the driving pressure applied to the deformable membrane to deform it.Compared with polymer membranes,the deformable membrane prepared on the top layer silicon of SOI had better temperature stability and could be released using the deep reactive ion etching technique after silicon-silicon bonding,avoiding deformation during the preparation process.In addition,due to the small gap between the membrane and the inlet/outlet holes,the dead volume of the microvalve was very small.The test results indicated that the micro-valve achieved flow control and ON/OFF functions with good repeatability.关键词
气相色谱/开关型气动微阀/流量控制/微机电系统Key words
Gas chromatography/ON/OFF type pneumatic micro-valve/Flow control/Micro-electro-mechanical system引用本文复制引用
马少杰,李文博,祝雨晨,李之睿,赵斌,冯飞..一种基于微机电系统的具有三明治结构的开关型气动微阀[J].分析化学,2025,53(5):758-764,7.基金项目
国家重点研发计划项目(No.2021YFC2800301)、中国科学院战略性先导科技专项(C类)(No.XDC0250103)和上海东方英才计划资助. Supported by the National Key R&D Program of China(No.2021YFC2800301),the Strategic Priority Research Program of the Chinese Academy of Sciences(No.XDC0250103)and the Shanghai Oriental Talent Program. （No.2021YFC2800301）
