摘要
Abstract
Improving the photoelectric conversion efficiency of solar cells mainly involves changing the microstructure of mono-Si surface and zoning doping process.By changing the thickness and process conditions of SiO2/SiNx stacked films,their passivation and light trapping effects on silicon wafers can be enhanced.Therefore,it involves the measurement and characterization of film thickness and other optical parameters.This paper first introduces the materials,preparation techniques,and performance testing of anti-reflection coatings on the surface of c-Si solar cells.Then,for the optical parameter testing of anti-reflection coatings,an online ellipsometer suitable for full inspection of production lines is introduced,and the testing performance of this online ellipsometer is compared with commonly used offline ellipsometers through experiments.The research results show that:1)The online ellipsometer adopts non-contact measurement,which can achieve"zero"loss of c-Si solar cells.It can achieve full inspection of the production line,eliminate abnormal c-Si solar cells,reduce costs,and improve the overall quality of the production line,reduce manual sampling costs and fragment risks.Real time monitoring data can be provided during production line process adjustments.Matching manufacturing execution system(MES)enables process traceability of data,which is beneficial for rapid analysis of problems.2)The comparative tests of SiNx anti-reflection coating thickness and refractive index for small batch c-Si solar cells show that the online ellipsometer is basically consistent with the test results of the offline laser ellipsometer,and has been recognized by the solar cell manufacturer.3)After mass production application verification,it has been proven that the online ellipsometer can provide effective assistance in improving the yield of c-Si solar cell production lines.关键词
太阳电池/减反射膜/光学参数测试/椭偏仪/在线/生产线全检/偏移量Key words
solar cells/anti-reflection coating/optical parameter testing/ellipsometer/online/full inspection of production line/offset分类
动力与电气工程
