现代应用物理2025，Vol.16Issue(2)：178-186,9.DOI:10.12061/j.issn.2095-6223.202408013
沟道宽度及长度对DSOI晶体管电离总剂量效应的影响
Influence of Channel Width and Length on Total Ionizing Dose Effects in DSOI Transistors
摘要
Abstract
The double silicon-on-insulator(DSOI)technology,owing to its dielectric isolation advantage from the buried oxide layers and the dynamic electric field modulation capability of the back-gate electrode,has emerged as a key development direction for next-generation radiation-hardened devices.This study investigates the total ionizing dose(TID)effects on H-gate DSOI devices,specifically examining how variations in channel width and length influence their electrical performance.The results indicate that as the channel width increases,threshold voltage shift becomes significantly more pronounced.Conversely,increasing the channel length effectively mitigates this shift.Additionally,post-irradiation off-state leakage current exhibits significant variations across devices with different channel dimensions,with short-channel devices showing a more pronounced leakage increase,which suggests higher radiation sensitivity.TCAD simulations reveal that both channel width and length influence the generation of radiation-induced oxide trap charges by modulating the electric field distribution in the buried oxide layers.The strongest field intensity is observed in wider and shorter devices.Furthermore,the accumulation of oxide trap charges alters the electrostatic potential at the back interface,thereby affecting the generation of interface trap charges.The spatial distribution differences between oxide and interface trap charges are the primary factors contributing to the channel size-dependent radiation sensitivity of these devices.关键词
电离总剂量效应/DSOI NMOSFET/沟道长度/沟道宽度/陷阱电荷Key words
total ionizing dose effect/DSOI NMOSFET/channel length/channel width/trap charge分类
核科学引用本文复制引用
杨弘毅,郑齐文,崔江维,李豫东,郭旗..沟道宽度及长度对DSOI晶体管电离总剂量效应的影响[J].现代应用物理,2025,16(2):178-186,9.基金项目
国家重点研发计划资助项目(2022YFB4401700) （2022YFB4401700）
新疆维吾尔自治区重点研发计划资助项目(2023B01008) （2023B01008）
新疆维吾尔自治区自然科学基金资助项目(2022D01E92) （2022D01E92）
