现代应用物理2025，Vol.16Issue(2)：133-140,8.DOI:10.12061/j.issn.2095-6223.202403017
一种基于终端扩展结构的高场强平面碳化硅光导器件仿真研究
Simulation of High-Field Lateral Silicon Carbide Photoconductive Devices With Terminal-Extension Structure
摘要
Abstract
As a type of the struture of photoconductive devices,the performance of lateral photoconductive devices have long been constrained by inter-electrode flashover and dielectric breakdown.To improve the working voltage of photoconductive devices,terminal-extension electric field shielding structure is proposed in this paper.Specifically,p-type/n-type SiC high-conductivity layers are epitaxially grown beneath the anode and cathode of the device.This design achieves dynamic homogenization of the internal electric field through dual mechanisms:enlarging electrode curvature radius and introducing a reverse charge compensation electric field.Based on TCAD numerical simulation software,systematic analyses are conducted to investigate how critical parameters,including curvature radius,SiC layer doping concentration,and thickness,affect the optimization of the on-state peak electric field and maximum current density.The simulation results show that the terminal extension structure can effectively homogenize the dynamic peak electric field inside the device and alleviate current accumulation.In the case of a 1 mm electrode gap with a peak power of 100 kW·mm-2 and a bias electric field of 100 kV·cm-1,compared to the original device,the optimized device can reduce the maximum electric field and maximum current density by 90％and 81％,respectively,while reducing the conduction resistance by 26％.The terminal extension structure can provide a reference scheme for improving the on-state breakdown voltage of lateral photoconductive devices.关键词
SiC/光电导半导体开关/平面器件/终端结构/半导体仿真Key words
silicon carbide/photoconductive semiconductor switch/lateral device/terminal structure/semiconductor simulation分类
信息技术与安全科学引用本文复制引用
刘福印,王朗宁,何婷,曾玲珑,王日品,牛昕玥,易木俣,荀涛..一种基于终端扩展结构的高场强平面碳化硅光导器件仿真研究[J].现代应用物理,2025,16(2):133-140,8.基金项目
国家自然科学基金资助项目(62071477,62101577) （62071477,62101577）
