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MEMS microwave power detection chip based on fixed beams and its model

Qirui Xu Zhiyin Ding Debo Wang

半导体学报（英文版）2025，Vol.6Issue(6)：86-95,10.

半导体学报（英文版）2025，Vol.6Issue(6)：86-95,10.DOI:10.1088/1674-4926/24100018

MEMS microwave power detection chip based on fixed beams and its model

Qirui Xu ¹Zhiyin Ding ¹Debo Wang¹

作者信息

1. College of Integrated Circuit Science and Engineering,Nanjing University of Posts and Telecommunications,Nanjing 210023,China
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摘要

关键词

detection chip/dual-guided fixed beam/MEMS/load sensing model/sensitivity

Key words

detection chip/dual-guided fixed beam/MEMS/load sensing model/sensitivity

引用本文复制引用

Qirui Xu,Zhiyin Ding,Debo Wang..MEMS microwave power detection chip based on fixed beams and its model[J].半导体学报（英文版）,2025,6(6):86-95,10.

基金项目

This work was supported by the National Natural Sci-ence Foundation of China(61904089),the Province Natural Sci-ence Foundation of Jiangsu(BK20190731). （61904089）

半导体学报（英文版）

ISSN：1674-4926

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