空间科学学报2025，Vol.45Issue(2)：601-611,11.DOI:10.11728/cjss2025.02.2024-0147
面向冷气推力器的高分辨率低噪声微流量传感器设计与标定
Design and Calibration of High-resolution Low-noise Micro Flow Sensors for Cold Gas Thrusters
摘要
Abstract
Micro flow sensors are critical for the precise measurement and control of gas flow in cold gas thruster systems,directly influencing the overall performance of these systems in space applications.However,conventional micro flow sensors suffer from limitations such as low resolution,high noise,and slow response time,which restrict their effectiveness in high-precision scenarios like drag-free control for space-based gravitational wave detection.To address these challenges,this paper presents the develop-ment of a MEMS-based micro flow sensor system utilizing the constant temperature difference principle.The sensor incorporates four MEMS platinum resistors arranged in a constant temperature difference configuration.A high-precision constant temperature difference driving circuit maintains a stable temper-ature gradient at the sensor's detection site,ensuring enhanced measurement consistency.The sensor sys-tem employs a temperature measurement bridge,which converts minute temperature variations into electrical signals.These signals are subsequently amplified by a high-precision programmable amplifier and digitized using a 24-bit high-resolution ADC.This approach significantly reduces noise while improv-ing measurement precision,overcoming the limitations of traditional micro flow sensors.Experimental re-sults demonstrate that the developed micro flow sensor achieves an equivalent output noise of less than 0.126 μL·s-1·Hz-1/2 in the frequency range of 0.05 Hz to 1 Hz.Additionally,it offers an ultra-high resolu-tion of better than 0.06 μL·s-1,a measurement range of 0 to 1000 μL·s-1,and a rapid response time of 1.2 ms.These improvements in measurement resolution,noise suppression,and response speed significantly enhance the sensor's performance,making it well-suited for demanding aerospace applications.The ad-vancements in this micro flow sensor system provide crucial technical support for cold gas thruster sys-tems in space gravitational wave detection missions.By improving flow measurement accuracy and sta-bility,this sensor contributes to the enhanced performance of drag-free control systems,ensuring the pre-cise and stable operation of spacecraft during gravitational wave observations.关键词
微流量/恒温差/低噪声/高分辨率/冷气推力器Key words
Micro flow/Constant temperature difference/Low noise/High resolution/分类
信息技术与安全科学引用本文复制引用
孙博奥,窦申成,王小庆,杨双,杨超,刘雪峰,郑福..面向冷气推力器的高分辨率低噪声微流量传感器设计与标定[J].空间科学学报,2025,45(2):601-611,11.基金项目
国家重点研发计划项目资助(2023YFF0719801) （2023YFF0719801）
