强激光与粒子束2025，Vol.37Issue(6)：43-47,5.DOI:10.11884/HPLPB202537.240392
SU-8微米光栅衍射性能研究
Study on diffraction performance of SU-8 micron grating
摘要
Abstract
The influence of grating height on the diffraction efficiency of SU-8 micron gratings was studied.The diffraction efficiency of gratings with heights of 6-8 μm,12-16 μm,and 6-30 μm was simulated and analyzed using rigorous coupled wave theory.The simulation results show that when the grating height is 6 μm,the 0th order diffraction efficiency is the lowest and the 1st order diffraction efficiency is the highest;At 12 μm,the 0th order diffraction efficiency is the highest and the 1st order diffraction efficiency is the lowest.When the grating height continuously changes from 6-30 μm,the diffraction efficiency varies periodically.SU-8 thin films with different thicknesses were prepared,and 40 μm periodic gratings with different gate heights were fabricated using picosecond laser etching technology.The measurement results show that when the grating height of the 40 μm period grating is 6.83 μm,the-1st order diffraction efficiency is 28.4%,and the 0th order diffraction efficiency is about 14.7%;When the grating height is 13.45 μm,the 0th order diffraction efficiency is 31.46%and the 1st order diffraction efficiency is 12.35%.The magnitude of the 0th and 1st order diffraction efficiencies varies with the grating height period.The theoretical simulation and experimental exploration can provide important references for the preparation of SU-8 micron gratings and the improvement of first-order diffraction efficiency.关键词
衍射光栅/衍射效率/严格耦合理论/皮秒加工Key words
diffraction grating/diffraction efficiency/strict coupling theory/picosecond processing分类
数理科学引用本文复制引用
李景鹏,王珏,张雪凤,李毅,岱钦,崔建丰,王磊,乌日娜..SU-8微米光栅衍射性能研究[J].强激光与粒子束,2025,37(6):43-47,5.基金项目
国家重点研发计划(2022YFB4601603) （2022YFB4601603）
2022年辽宁省"揭榜挂帅"科技计划重点项目 （）
沈阳理工大学光选科研团队建设项目 （）
