中国光学（中英文）2025，Vol.18Issue(3)：452-459,8.DOI:10.37188/CO.2025-0010
用于冲击波测量的硅MEMS光纤法珀压力传感器
Fiber-optic Fabry Perot pressure sensor for shock wave measurements based on silicon MEMS
摘要
Abstract
This paper proposes a fiber-optic Fabry-Perot pressure sensor based on microelectromechanical systems(MEMS)technology for the measurement of transient pressures,including shock waves.The sensit-ive unit is composed of etched silicon wafers and BF33 glass wafers by anodic bonding,and the adhesive-free integration of the optical fiber and the sensitive unit is realized by laser fusion bonding technology.A signal demodulation experiment platform was constructed to comprehensively evaluate the pressure sensing characteristics of the sensors in static and dynamic pressure environments.The experimental findings demon-strate that the sensor exhibits a satisfactory linear response within the pressure range of 0-10 MPa,with a full-scale non-linear error of 0.41％and a hysteresis of 0.37％.Furthermore,the sensor demonstrated a rise time of 8.5 μs during dynamic pressure measurements.The sensor has the advantages of anti-electromagnet-ic interference,high consistency,low cost,and has a theoretical resonant frequency of 1.39 MHz,demon-strating the prospect of its wide application for dynamic pressure measurement in harsh environments such as explosion fields.关键词
法布里-珀罗/冲击波/光纤传感器/压力测量Key words
Fabry-Perot/shock wave/fiber optic sensor/pressure measurement分类
计算机与自动化引用本文复制引用
殷建雄,王军,王昊星,万顺,刘佳,贾平岗..用于冲击波测量的硅MEMS光纤法珀压力传感器[J].中国光学（中英文）,2025,18(3):452-459,8.基金项目
国家自然科学基金(No.51935011) （No.51935011）
山西省科技创新人才团队专项资助(No.202204051001016)Supported by National Natural Science Foundation of China(No.51935011) （No.202204051001016）
Special Fund for Science and Technology Innovation Group of Shanxi Province(No.202204051001016) （No.202204051001016）
