中国光学（中英文）2025，Vol.18Issue(3)：467-476,10.DOI:10.37188/CO.2024-0174
变量耦合动态监控光学膜厚补偿技术
Variable coupling dynamic monitoring and compensation technology of optical film thickness
摘要
Abstract
To address issues related to the accurate control of infrared band film thickness and precise wavelength positioning,we employ the LabVIEW programming language to develop a dynamic monitoring and compensation technology for optical film thickness,based on an optical film thickness monitoring sys-tem.Based on the principles of light interference and optical thin film design,a mathematical model is con-structed using the photoelectric polarimetric method.We focus on resolving stopping errors and filtering noise at extremum points,thereby accurately restoring the real-time monitoring data of light intensity.The system achieves real-time and synchronous fitting of the film's transmittance curve,calculates and fits the stopping point corresponding to the extremum of the film thickness.To validate the reliability and stability of the optical control system,a 1 064 nm narrow-band filter film was fabricated.The results indicate that the peak transmittance of the 1064 nm narrow-band filter film reached 91.5％,with a pass-band half-width of 5 nm.The error of the monitoring system was calculated to be less than 0.01％.关键词
光学薄膜/膜厚监控/拟合算法/窄带滤光膜Key words
optical film/film thickness monitoring/fitting algorithm/narrow-band filter分类
物理学引用本文复制引用
杜昕,付秀华,董所涛,潘永刚,王由德,谢海峰..变量耦合动态监控光学膜厚补偿技术[J].中国光学（中英文）,2025,18(3):467-476,10.基金项目
国家自然科学基金(No.62127813) （No.62127813）
中山市引进创新团队项目(No.CXTD2023008) （No.CXTD2023008）
中山市社会公益科技研究项目(No.2022B2005)Supported by National Natural Science Foundation of China(No.62127813) （No.2022B2005）
Zhongshan Introduces Innovat-ive Team Program(No.CXTD2023008) （No.CXTD2023008）
Zhongshan Social Welfare Science and Technology Research Pro-gram(No.2022B2005) （No.2022B2005）
