中国光学（中英文）2025，Vol.18Issue(3)：477-486,10.DOI:10.37188/CO.2024-0188
氮化镓光波导的损耗特性分析与工艺优化
Loss characteristics analysis and process optimization of GaN optical waveguide
摘要
Abstract
In this paper,we investigate the transmission loss characteristics of gallium nitride(GaN)planar optical waveguides using a finite element simulation model based on the beam propagation method(BPM).To address the high transmission loss in conventional GaN waveguides,we propose process optimization solutions.By constructing a comprehensive transmission loss model,we systematically analyze the impact of waveguide geometric parameters on the transmission characteristics,with a particular focus on investigating the improvement effects of two optimization processes:top etching and back thinning.The experiment res-ults indicate that both processes significantly reduce the waveguide transmission loss,with the top etching process reducing loss from 2.29 dB/mm to 0.19 dB/mm and the back thinning process reducing it to 0.24 dB/mm.Additionally,we analyze the impact of manufacturing defects,such as sidewall angles and sur-face roughness,on transmission loss.Through parameter optimization,we identify the key dimensions neces-sary for single mode light transmission.This study provides a theoretical basis and process guidance for the development of low-loss GaN waveguides.关键词
氮化镓光波导/可见光通信/传输损耗/工艺优化/单模传输Key words
GaN optical waveguide/visible light communication/transmission loss/process optimization/single mode transmission分类
电子信息工程引用本文复制引用
尹慧萍,李文迪,冯萧萧,秦飞飞,施政,王永进,李欣..氮化镓光波导的损耗特性分析与工艺优化[J].中国光学（中英文）,2025,18(3):477-486,10.基金项目
国家自然科学基金(No.62274096,No.62204127) （No.62274096,No.62204127）
江苏省高等学校基础科学(自然科学)研究重大项目(No.22KJA510003) （自然科学）
江苏省自然科学基金(No.BK20210593)Supported by National Natural Science Foundation of China(No.62274096,No.62204127) （No.BK20210593）
Key Project of the Natural Science Foundation of the Jiangsu Higher Education Institutions of China(No.22KJA510003) （No.22KJA510003）
Jiangsu Province Natural Science Foundation(No.BK20210593) （No.BK20210593）
