中国光学（中英文）2025，Vol.18Issue(3)：612-621,10.DOI:10.37188/CO.2024-0186
光读出高精度惯性传感器残余气体噪声仿真研究
Simulation of residual gas noise in high-precision inertial sensors with optical readout
摘要
Abstract
High-precision inertial sensors have broad application prospects in fields such as aerospace,navig-ation,and precision measurement.However,the accurate evaluation of noise in these sensors is imperative for optimal performance,with residual gas noise being a significant source of noise in inertial sensors.The current methods for calculating the level of residual gas noise lack numerical simulations based on the actual structure of inertial sensors,which hinders the ability to meet the demands of high-precision noise analysis.This paper proposes a novel residual gas noise simulation method based on ray tracing technology.Firstly,the method simulates the trajectories of residual gas inside the electrode cage of the inertial sensor under or-bital conditions using a real inertial sensor model to obtain the statistical characteristics of the residual gas ac-celeration noise.Secondly,the influence of different pressures and temperatures on the residual gas noise is investigated.Finally,the dependence of the residual gas noise on the gap size of the non-sensitive axis is ana-lyzed.The simulation results demonstrate the efficacy of Ray Tracing technology in simulating and tracking the interaction between the residual gas and the sensitive structures,achieving a high-precision simulation of residual gas acceleration noise at the level of 10-15.Temperature and pressure have been shown to signific-antly affect the level of residual gas acceleration noise,and reducing the gap between the electrode cage and the test mass will increase the power spectrum of the residual gas noise in the inertial sensor.关键词
空间引力波探测/惯性传感器/残余气体噪声/射线追踪Key words
space-based gravitational wave detection/inertial sensor/residual noise/ray tracing分类
通用工业技术引用本文复制引用
王芳,佘明超,彭晓东,强丽娥,徐鹏,唐文林,张玉珠..光读出高精度惯性传感器残余气体噪声仿真研究[J].中国光学（中英文）,2025,18(3):612-621,10.基金项目
国家重点研发计划资助(No.2020YFC2200603,No.2020YFC2201303) （No.2020YFC2200603,No.2020YFC2201303）
国家自然科学基金青年科学基金(No.11905017) （No.11905017）
中国科学院重点部署科研专项(No.KGFZD-145-24-04-03)Supported by the National Key Research and Development Program(No.2020YFC2200603,No.2020YFC2201303) （No.KGFZD-145-24-04-03）
the National Science Foundation for Young Scientists of China(No.11905017) （No.11905017）
Key De-ployment Projects of the Chinese Academy of Sciences(No.KGFZD-145-24-04-03) （No.KGFZD-145-24-04-03）
