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Manufacturing high-performance flexible sensors via advanced patterning techniques

Xiaokun Qin Bowen Zhong Hao Xu Joshua A Jackman Kaichen Xu Nam-Joon Cho Zheng Lou Lili Wang

International Journal of Extreme Manufacturing2025，Vol.7Issue(3)：P.81-124,44.

International Journal of Extreme Manufacturing2025，Vol.7Issue(3)：P.81-124,44.DOI:10.1088/2631-7990/ada857

Manufacturing high-performance flexible sensors via advanced patterning techniques

Xiaokun Qin ¹Bowen Zhong ¹Hao Xu ¹Joshua A Jackman ²Kaichen Xu ³Nam-Joon Cho ⁴Zheng Lou ¹Lili Wang¹

作者信息

1. State Key Laboratory for Semiconductor Physics and Chip Technologies,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,People’s Republic of China Center of Materials Science and Optoelectronic Engineering,University of Chinese Academy of Sciences,Beijing 100049,People’s Republic of China
2. School of Chemical Engineering and Translational Nanobioscience Research Center,Sungkyunkwan University,Suwon 16419,Republic of Korea
3. State Key Laboratory of Fluid Power and Mechatronic Systems,School of Mechanical Engineering,Zhejiang University,Hangzhou,People’s Republic of China
4. School of Materials Science and Engineering,Nanyang Technological University,Singapore 637553,Singapore
折叠

摘要

关键词

patterned process/flexible sensor/patterned structure/performance enhancement

分类

信息技术与安全科学

引用本文复制引用

Xiaokun Qin,Bowen Zhong,Hao Xu,Joshua A Jackman,Kaichen Xu,Nam-Joon Cho,Zheng Lou,Lili Wang..Manufacturing high-performance flexible sensors via advanced patterning techniques[J].International Journal of Extreme Manufacturing,2025,7(3):P.81-124,44.

基金项目

financial support from the National Key Research and Development Program of China(Grant 2024YFB3212100) （Grant 2024YFB3212100）

National Natural Science Foundation of China(NSFC Grant Nos.62422409,62174152 and 62374159) （NSFC Grant Nos.62422409,62174152 and 62374159）

from the Youth Innovation Promotion Association of Chinese Academy of Sciences(No.2020115)。（No.2020115）

International Journal of Extreme Manufacturing

ISSN：2631-8644

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