高压电器2025，Vol.61Issue(6)：156-163,8.DOI:10.13296/j.1001-1609.hva.2025.06.018
电力储能检测用SnO2/Pd薄膜型氢气传感器及其性能研究
Research on SnO2/Pd Thin-film Hydrogen Sensor for Power Storage Detection and Its Performances
摘要
Abstract
For improving the accuracy and efficiency of hydrogen concentration in early fault of power storage sys-tem and assuring safe operation and high stability of the storage equipment,a series of SnO2/Pd thin film hydrogen sensors are prepared by magnetron sputtering co-sputtering technology.The metal-oxide-semiconductor films doped with SnO2/Pd are prepared on ceramic plates with different RF sputtering powers(130 W and 150 W),and the com-prehensive gas-sensitive properties are tested.The result shows that the 150 W-power sample(sample B)shows bet-ter responsiveness and higher operating temperature at the same hydrogen concentration,while the 130 W-power sample(sample A)shows better long-term stability.Both sensors have good selectivity,can effectively distinguish other interfering gases in the oil,and accurately detect the variation of hydrogen concentration.The new thin-film gas sensor has superior performance characteristics and provides a reliable technical means for real-time hydrogen monitoring in the field of electric power energy storage,substation,hydrogen industry and environmental protection.关键词
磁控溅射/氧化锡/钯/薄膜型/传感器/电力储能检测/半导体薄膜Key words
magnetron sputtering/tin oxide/palladium/thin film type/sensor/power storage detection/semicon-ductor film引用本文复制引用
穆石磊,蒋建杰,邓鹤鸣,周开运,李佳丽,严雪莹,韩磊..电力储能检测用SnO2/Pd薄膜型氢气传感器及其性能研究[J].高压电器,2025,61(6):156-163,8.基金项目
浙江泰公电力集团有限责任公司科技项目(HZJTKJ2021-02).Project Supported by Science and Technology Project of Zhejiang Taigong Electric Power Group Co.,Ltd.(HZJTKJ2021-02). （HZJTKJ2021-02）
