计量学报2025，Vol.46Issue(5)：673-680,8.DOI:10.3969/j.issn.1000-1158.2025.05.08
材料热处理用真空退火炉校准技术研究
Research on Calibration Technology of Vacuum Annealing Furnace for Material Heat Treatment
摘要
Abstract
Vacuum annealing furnaces are used for heat treatment of materials under vacuum or protective atmosphere,and online calibration is required.Currently,there is a lack of calibration equipments and calibration method guidance.In response to this,a temperature online calibration device for vacuum annealing furnace was designed to solve the sealing problem of the connection between the vacuum annealing furnace and the temperature sensor.By combining multiple multi-point armored thermocouples,three-dimensional temperature measuring frames,multi-channel data acquisition instruments,and online calibration devices,the online calibration of the temperature uniformity,stability,deviation,effective heating zone and other metrological characteristics of the vacuum annealing furnace were achieved.The temperature uniformity of the same vacuum annealing furnace was tested using this method,along with the temperature measurement ring method and black box temperature measurement method.The results showed that there was a significant deviation in the measurement results between the temperature measurement ring method and the black box temperature measurement method.The measurement results of this method are ∆θ+=(4.2±1.5)℃,k=2;∆θ-=(-5.6±1.6)℃,k=2;the effective heating zone size is 900 mm in length,800 mm in width,and 800 mm in height.The measurement results meet the requirements for use.The accuracy and reliability of this calibration method have been verified through comparison with three laboratories,and the results are satisfactory.关键词
温度计量/真空退火炉/温度均匀性/校准装置/比对法/不确定度评定Key words
temperature measurement/vacuum annealing furnace/temperature uniformity/calibration equipment/comparison method/uncertainty evaluation引用本文复制引用
余泽利,王晨曦,房永强,杨军红,李荣,余森..材料热处理用真空退火炉校准技术研究[J].计量学报,2025,46(5):673-680,8.基金项目
国家自然科学基金(32071327) （32071327）
