基于图案化宾主液晶的光刻掩膜板制备
Fabrication of photomask based on patterned guest-host liquid crystal
摘要
Abstract
Micro-nano structures play a crucial role in numerous fields,particularly in optics,sensing,and display technologies.Although various techniques have been developed for micro-nano structure fabrication,achieving these structures through simple and low-cost approaches remains a significant challenge.To address this issue,this paper proposes a design based on patterned oriented guest-host liquid crystals,which successfully realizes the preparation of mask templates constructed on demand.Specifically,the patterned mask is successfully established through the combination of the anisotropic absorption characteristics of guest-host liquid crystals to polarized light and the photo-alignment technology,achieving precise spatial intensity regulation of the incident light field.By introducing it into the laser direct writing system,micro-nano structures with various geometric patterns were successfully formed on the surface of the photoresist.The structure is in close agreement with the predefined mask,demonstrating the capability of structural manufacturing at the micron level(feature size 5 μm).In addition,the self-assembly of liquid crystal on the micro-nano structure enable period grating,thereby achieving stable diffraction under short-wavelength conditions.This result further demonstrates that the designed liquid crystal mask can achieve precise control over the intensity of incident light by accurately modulating the spatial distribution of the optical field.This study provides a novel and cost-effective approach for microstructure fabrication,offering new opportunities for the development of large-area,rapid manufacturing techniques for complex micro-nano structures.关键词
宾主液晶/掩模板/光取向/微纳结构Key words
guest-host liquid crystal/photomask/photoalignment/micro-nano structures引用本文复制引用
王俊辉,刘璇,段霞,李博远,袁丛龙,郑致刚..基于图案化宾主液晶的光刻掩膜板制备[J].液晶与显示,2025,40(6):846-853,8.基金项目
国家重点研发计划(No.2022YFA1203700) （No.2022YFA1203700）
国家自然科学基金(No.T2488302,No.62275081,No.62035008) （No.T2488302,No.62275081,No.62035008）
上海市教育委员会,上海市科技创新计划重大项目(No.2021-01-07-00-02-E00107) （No.2021-01-07-00-02-E00107）
上海市教委,上海教育发展基金会曙光计划(No.21SG29) （No.21SG29）
上海市启明星专项杨帆计划(No.24YF2709100) （No.24YF2709100）
国家资助博士后研究人员计划B档(No.GZB20240218)Supported by National Key Research and Development Program of China(No.2022YFA1203700) （No.GZB20240218）
National Science Foundation of China(No.T2488302,No.62275081,No.62035008) （No.T2488302,No.62275081,No.62035008）
Innovation Program of Shanghai Municipal Education Commission,Scientific Committee of Shanghai(No.2021-01-07-00-02-E00107) （No.2021-01-07-00-02-E00107）
"Shuguang Program"of Shanghai Education Development Foundation,and Shanghai Municipal Education Commission(No.21SG29) （No.21SG29）
Shanghai Sailing Program(No.24YF2709100) （No.24YF2709100）
Postdoctoral Fellowship Program of CPSF(No.GZB20240218) （No.GZB20240218）
