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Beyond Performance of Learning Control Subject to Uncertainties and Noise:A Frequency-Domain Approach Applied to Wafer Stages

Fazhi Song Ning Cui Shuaiqi Chen Kai Zhang Yang Liu Xinkai Chen Jiubin Tan

自动化学报（英文版）2025，Vol.12Issue(1)：198-214,17.

自动化学报（英文版）2025，Vol.12Issue(1)：198-214,17.DOI:10.1109/JAS.2024.124968

Beyond Performance of Learning Control Subject to Uncertainties and Noise:A Frequency-Domain Approach Applied to Wafer Stages

Fazhi Song ¹Ning Cui ²Shuaiqi Chen ²Kai Zhang ²Yang Liu ²Xinkai Chen ³Jiubin Tan²

作者信息

1. Center of Ultra-precision Optoelectronic Instrument Engineering,Harbin Institute of Technology,Harbin 150080||Key Laboratory of Ultra-Precision Intelligent Instrumentation,Ministry of Industry and Information Technology,Harbin 150080||State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment,Guangdong University of Technology,Guangzhou 510006,China
2. Center of Ultra-precision Optoelectronic Instrument Engineering,Harbin Institute of Technology,Harbin 150080||Key Laboratory of Ultra-Precision Intelligent Instrumentation,Ministry of Industry and Information Technology,Harbin 150080,China
3. Department of Electronic and Information Systems,Shibaura Institute of Technology,Tokyo 3378570,Japan
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摘要

关键词

Extended state observer/learning control/model uncertainties/motion control/stochastic noise

Key words

Extended state observer/learning control/model uncertainties/motion control/stochastic noise

引用本文复制引用

Fazhi Song,Ning Cui,Shuaiqi Chen,Kai Zhang,Yang Liu,Xinkai Chen,Jiubin Tan..Beyond Performance of Learning Control Subject to Uncertainties and Noise:A Frequency-Domain Approach Applied to Wafer Stages[J].自动化学报（英文版）,2025,12(1):198-214,17.

基金项目

This work was supported by National Natural Science Foundation of China(52375530,52075132),Natural Science Foundation of Heilongjiang Province(YQ2022E025),State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment(Guangdong University of Technology)(JMDZ202312),Fundamental Research Funds for the Central Universities(HIT.OCEF.2024034),China Postdoctoral Science Foundation(2019M651278,2020T130155),Heilongjiang Province Postdoctoral Science Foundation(LBH-Z19066),and Space Drive and Manipulation Mechanism Laboratory of BICE and National Key Laboratory of Space Intelligent Control,No BICE-SDMM-2024-01. （52375530,52075132）

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