发光学报2025，Vol.46Issue(6)：1048-1056,9.DOI:10.37188/CJL.20250023
Er3+掺杂AlScN薄膜发光及铁电性能的协同调控
Synergistic Regulation of Luminescent and Ferroelectric Properties of Er3+-doped AlScN Films
摘要
Abstract
lanthanide ions have abundant luminescent energy levels,with their luminescence intensity and wave-length affected by the lattice symmetry.The regulation of luminescence properties via controllable lattice fields can be realized by altering electric fields and stress.Ferroelectric material has non-volatile spontaneous polarization,and its direction can be reversed or reoriented by electric fields.Doping lanthanide ions as luminescence centers into fer-roelectric materials and utilizing the ferroelectric polarization field for dynamic regulation of lanthanide ions'lumines-cence wavelength and intensity can significantly improve the performance of semiconductor optoelectronic devices.AlScN,with its dynamically tunable high remanent polarization,large bandgap,and high compatibility with CMOS processes,offers new opportunities for constructing novel luminescent devices with multifunctional ferroelectric regu-lation.This paper investigated the effects of Er3+doping concentrations on the luminescence and ferroelectric proper-ties of AlScN films.The Er3+doping concentration rises,and more luminescence centers are incorporated,effectively enhancing the luminescence potential.Notably,a marked increase in luminescence of Er3+-doped AlScN films was achieved at doping concentrations of 3.6%to 9.4%.However,when the doping concentration exceeded 10%,a quenching effect led to the decrease of luminescence,highlighting the importance of precisely controlling the doping limit for optimal performance.Although the increase in Er3+doping concentration slightly degraded the performance of AlScN,the remanent polarization remained above 80 μC/cm2 at a concentration of 9.4%,demonstrating the coex-istence of luminescence and robust ferroelectric performance in Er3+-doped AlScN films.This research fills the gap regarding lanthanide ions-doped AlScN films,laying a solid foundation for the development of highly integrated,mul-tifunctional luminescent devices and potentially catalyzing innovation in the optoelectronic domain.关键词
AlScN/Er3+/光致发光/强铁电性Key words
AlScN/Er3+/photoluminescence/robust ferroelectric performance分类
数理科学引用本文复制引用
李丹,刘明睿,王帅,贾玉萍,臧行,孙蕊,张山丽,孙晓娟,黎大兵..Er3+掺杂AlScN薄膜发光及铁电性能的协同调控[J].发光学报,2025,46(6):1048-1056,9.基金项目
国家重点研发计划(2021YFA0715600) （2021YFA0715600）
国家自然科学基金(12204475) Supported by National Key Research and Development Program of China(2021YFA0715600) （12204475）
National Natural Science Foun-dation of China(12204475) （12204475）
