光学精密工程2025，Vol.33Issue(8)：1179-1189,11.DOI:10.37188/OPE.20253308.1179
基于全视场外差干涉的中心偏差测量技术研究
Research on centering error measurement technology based on full-field heterodyne
摘要
Abstract
To meet the increasing demands for greater precision in measuring the centering error of optical lenses,this paper proposed a centering error measurement method based on full-field heterodyne interfer-ometry.This method used the actual optical axis of the test lens as the measurement reference,obtained the wavefront by measuring the interference fringes generated by the reflected beam of the measured lens and the reference beam,and performed Zernike polynomial fitting.The tilt coefficients of the Zernike poly-nomials were then converted into the centering error of the test lens,achieving high-precision measure-ment of the centering error and eliminating the reliance on an external rotational stage.Based on hetero-dyne interference and centering error principle,the influence of laser intensity fluctuations and heterodyne frequency fluctuations on wavefront and decenter measurement results was analyzed.The results showed that measurement errors were positively correlated with laser intensity and heterodyne frequency fluctua-tions and were also affected by the curvature and decenter of the test lens.A decenter measurement sys-tem based on heterodyne interferometry was constructed,achieving high-precision decenter measurement,which was compared with simulation results.The simulation results show that the measurement accuracy of the system is not less than 0.06″,and experimental results validated the simulations.The study indi-cates that,compared to traditional autocollimation-based decenter measurement methods,the heterodyne interferometry method can achieve higher measurement accuracy.关键词
外差干涉/干涉测量/中心偏差/装调设备Key words
heterodyne interferometry/interferometry technology/centering error/assembling apparatus分类
机械工程引用本文复制引用
杨永康,刘安琪,张文喜,伍洲..基于全视场外差干涉的中心偏差测量技术研究[J].光学精密工程,2025,33(8):1179-1189,11.基金项目
中国科学院科研仪器设备研制项目(No.PTYQ2024TD0036) （No.PTYQ2024TD0036）
