光学精密工程2025，Vol.33Issue(8)：1212-1227,16.DOI:10.37188/OPE.20253308.1212
基于球阵列的磁阻式时栅位移传感机理和测量模型研究
Research on sensing mechanism and measurement model of magnetoresistive time-grating displacement based on spherical array
摘要
Abstract
Aiming at the problem that traditional displacement sensors do not balance both long range and high precision,a new displacement measurement method combining the time-grating principle with the magnetoresistive effect based on a spherical array was proposed.The orthogonally changing magnetic field was constructed by using spatial orthogonal excitation windings,and the magnetic field was accurately con-straint-controlled by the spatial periodic sensing structure.The mapping relationship between magnetore-sistance and displacement was established by using induction windings to pick up the change in the magnet-ic field,which revealed the displacement sensing mechanism.The model parameters were optimized by electromagnetic simulation,the sensor prototype was developed,the experimental platform was built,and the measurement error experiments of the sensor were conducted.The experimental results show that the sensor has a measurement error of±9.4 μm and a resolution of 0.1 μm within the 512 mm measurement range.Micrometer scale measurement accuracy is realized using the millimeter scale sensing unit,which greatly reduces the manufacturing difficulty of the sensor.Furthermore,the measurement range can be in-creased with the requirements of the applications,and its high resolution measurement can be achieved without the interpolation technology.It can be used in harsh environments such as strong oil pollution con-ditions,which promises the significant academic value and engineering application value.关键词
球阵列/时栅传感器/磁场约束/直线位移Key words
spherical array/time-grating sensors/magnetic field constraint/linear displacement分类
机械工程引用本文复制引用
陈自然,秦莉莉,王伟,熊昕,刘振越,郑永海..基于球阵列的磁阻式时栅位移传感机理和测量模型研究[J].光学精密工程,2025,33(8):1212-1227,16.基金项目
国家重点研发计划(No.2023YFB3209400) （No.2023YFB3209400）
国家自然科学基金(No.52175495,No.52475549) （No.52175495,No.52475549）
重庆市自然科学基金创新发展联合基金(No.CSTB2023NSCQ-LZX0088) （No.CSTB2023NSCQ-LZX0088）
