轻工机械2025，Vol.43Issue(3)：62-68,7.DOI:10.3969/j.issn.1005-2895.2025.03.009
基于低相干干涉的小孔内表面几何尺寸及三维形貌测量系统
Measurement System of Geometric Dimensions and Three-Dimensional Morphology of Small Hole Inner Surface Based on Low Coherence Interference
摘要
Abstract
Aiming at the current difficulty of detecting small hole inner surface,the research group built a system of measuring the geometry and three-dimensional morphology for small hole inner surface based on the principle of low-coherence interferometry.The measurement system mainly included a swept frequency light source,a photoelectric detector,a data acquisition device,a reference arm and a sample arm and so on.A design scheme of a microfiber probe for small hole inner surface measurements were proposed.The system was verified by experiments,and the inner surface morphology of the small hole parts printed by Selective Laser Melting(SLM)was further restored by three-dimensional reconstruction.The results show that the measurement system could achieve high-precision geometric size measurement of small hole inner surface,and the measurement extension uncertainty is 4.454 μm with a standard ring gauge as the measurement object.The reconstructed three-dimensional model can clearly show the particles and particle stacking defects of the printed material.关键词
测量系统/三维形貌/低相干干涉/小孔内表面/微型光纤探针/三维重建Key words
measurement system/three-dimensional morphology/low coherence interference/small hole inner surface/microfiber probe/three-dimensional reconstruction分类
机械工程引用本文复制引用
毛哲辰,陈宁,郭钢祥,陈旭雯,祖洪飞..基于低相干干涉的小孔内表面几何尺寸及三维形貌测量系统[J].轻工机械,2025,43(3):62-68,7.基金项目
国家重点研发计划项目(2022YFF0606003) （2022YFF0606003）
浙江省市场监督管理局科技计划(ZC2023017) （ZC2023017）
浙江省市场监督管理局科技计划(ZD2024011) （ZD2024011）
国家市场监督管理总局科技计划(2024MK047). （2024MK047）
